UV excimer laser drilled high aspect ratio submicron via hole

Applied Surface Science

Volumn 256, Issue 1, 2009, Pages 183-186

  Chen, K H ^a   Wu, Wenhsing ^a   Chu, Byung Hwan ^a   Chang, C Y ^a   Lin, Jenshan ^a   Pearton, S J ^a   Norton, D P ^a   Ren, F ^a  

^a J Crayton Pruitt Family Department of Biomedical Engineering   (United States)

Author keywords

Laser drill; Microfilters; Nanopores; UV excimer laser

Indexed keywords

EXCIMER LASERS; MICROFILTRATION; NANOPORES;

HIGH ASPECT RATIO; LASER DRILL; MICROFILTERS; SIDE WALLS; SUBMICRON; UV-EXCIMER LASERS; VIA HOLE;

ASPECT RATIO;

EID: 70349766701     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2009.07.105     Document Type: Article

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