Laser micromachining of SrTiO3 single crystal

Solid-State Electronics

Volumn 47, Issue 12, 2003, Pages 2249-2253

  Most, D ^a   Choi, J ^a   Belenky, L J ^a   Eom, C B ^a  

^a University of Wisconsin Madison   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; LASER BEAM EFFECTS; SINGLE CRYSTALS; STRONTIUM COMPOUNDS; X RAY DIFFRACTION ANALYSIS;

LASER MICROMACHINING;

MICROMACHINING;

EID: 0142075244     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1101(03)00206-5     Document Type: Article

References (14)

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