Microstructuring of PYREX glass and polymers by excimer laser

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5116 I, Issue , 2003, Pages 20-27

  Keiper, Bernd ^a   Ebert, Robby ^a   Böhme, Rico ^b   Exner, Horst ^a  

^a UNIVERSITY OF APPLIED SCIENCES MITTWEIDA   (Germany)

^b Leibniz Institute of Surf ace Modification   (Germany)

Author keywords

Excimer laser; Microstructuring; Microsystems technology; Polymers; PYREX glass

Indexed keywords

EXCIMER LASERS; LASER APPLICATIONS; MASKS; MICROSTRUCTURE; POLYMETHYL METHACRYLATES; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DEVICE STRUCTURES; SURFACE ROUGHNESS;

MASK PROJECTION TECHNIQUE; PYREX GLASS;

GLASS;

EID: 0042830739     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.499002     Document Type: Conference Paper

References (3)

1. D. Tonneau, F. Thuron, A. Correia, J. E. Bouree, Y. Pauleau: Jpn. J. Appl. Phys. Vol. 37, S4954-4961 (1998)
2. M. E. Gross, K. P. Cheung, O. G. Flemming, J. Kovalchick, L. A. Heimbrook: J. Vac. Sci. Technol. A9, S57-64 (1991)
3. B. Keiper, H. Exner, U. Löschner, T. Kunze: J. Laser Applications Vol. 12, No. 5, S189-193 (2000)