Development of vacuum packaged CMOS thermoelectric energy harvester

4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009

Volumn , Issue , 2009, Pages 803-807

  Lee, Chengkuo ^a,b   Xie, Jin ^a  

^a INSTITUTE OF MICROELECTRONICS   (Singapore)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Energy harvester; MEMS; Power generator; Thermoelectric

Indexed keywords

ANALYTICAL MODELING; ENERGY HARVESTER; LOW COST APPROACH; NEW CONCEPT; OUTPUT POWER; OUTPUT VOLTAGES; POWER GENERATOR; TEMPERATURE DIFFERENCES; THERMOCOUPLE JUNCTIONS; THERMOELECTRIC; THERMOELECTRIC ENERGY; THERMOELECTRIC POWER GENERATORS; WAFERBONDING TECHNOLOGY;

HARVESTERS; MEMS; MICROELECTROMECHANICAL DEVICES; THERMOCOUPLES; THERMOELECTRIC POWER; VACUUM;

WAFER BONDING;

EID: 70349694757     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2009.5068699     Document Type: Conference Paper

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