Vertically aligned carbon nanotubes on copper substrates for applications as thermal interface materials: From synthesis to assembly

Proceedings - Electronic Components and Technology Conference

Volumn , Issue , 2009, Pages 441-447

  Lin, Wei ^a,b   Olivares, Rodger V ^a   Liang, Qizhen ^a,b   Zhang, Rongwei ^a   Moon, Kyoung Sik ^a   Wong, C P ^a  

^a School of Materials Science and Engineering University of School and Technology Beijing   (China)

^b Georgia Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA LAYERS; CHEMICAL ANCHORING; CONTACT INTERFACE; CONTACT THERMAL RESISTANCE; COPPER SUBSTRATES; DIRECT SYNTHESIS; ELECTRONIC PACKAGING; GROWTH SUBSTRATES; HIGH QUALITY; HIGH TEMPERATURE; INTERFACE MODIFICATION; INTERFACIAL ADHESIONS; METAL SURFACES; ORDER OF MAGNITUDE; ORDERS OF MAGNITUDE; PHONON TRANSPORT; PHOTONIC PACKAGING; RELIABILITY IMPROVEMENT; SCANNING ELECTRONIC MICROSCOPY; SI SUBSTRATES; SILICON CHIP; SUBSTRATE INTERFACE; SUPPORT LAYER; THERMAL CVD; THERMAL INTERFACE MATERIALS; THERMAL INTERFACES; THERMAL MANAGEMENT; THERMAL TRANSPORT; VERTICAL ALIGNMENT; VERTICALLY ALIGNED; VERTICALLY ALIGNED CARBON NANOTUBE; WELL-ALIGNED;

CARBON NANOTUBES; CHEMICAL COMPOUNDS; CHEMICAL VAPOR DEPOSITION; CHIP SCALE PACKAGES; COPPER; MICROELECTRONICS; PHONONS; RAMAN SPECTROSCOPY; SURFACES; SYNTHESIS (CHEMICAL); TECHNOLOGICAL FORECASTING; THERMAL CONDUCTIVITY; THERMAL INSULATING MATERIALS;

SUBSTRATES;

EID: 70349678289     PISSN: 05695503     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ECTC.2009.5074051     Document Type: Conference Paper

References (44)

1. Ebbesen T. W., Lezec H. J., Bennett J. W., Ghaemi H. F., and Thio T., "Electrical conductivity of individual carbon nanotubes," Nature, vol. 382 (1996), pp. 54-56.
2. Baughman R. H., Zakhidov A. A., and de Heer W. A., "Carbon nanotubes - the route toward applications," Science, vol.297 (2002), pp. 787-792.
3. Graham A. P., Duesberg G. S., Seidal R. V., Liebau M., Unger E., Pamler W., Kreupl F., and Hoenlein W., "Carbon nanotubes for microelectronics?, " Small, vol.1 (2005), pp. 382-390.
4. Pop E., Mann D., Wang Q., Goodson K., and Dai H. J., "Thermal conductance of an individual single-wall carbon nanotube above room temperature," Nano Letters, vol.6 (2006), pp. 96-100.
5. Xu J. and Fisher T. S., "Enhancement of thermal interface materials with carbon nanotube arrays," International Journal of Heat and Mass Transfer, vol.49 (2006), pp. 1658-1666.
6. Tong T., Zhao Y., Delzeit L., Kashani A., Meyyappan M., and Majumdar A., "Dense, vertically aligned multiwalled carbon nanotube arrays as thermal interface materials," IEEE Transactions on Components and Packaging Technologies, vol.30 (2007), pp. 92-100.
7. Kordas K., Toth G., Moilanen P., Kumpumaki M., Vahakangas J., Uusimaki A., Vajtai R., and Ajayon P. M., "Chip cooling with integrated carbon nanotube microfin architectures," Applied Physics Letters, vol.90 (2007).
8. Cola B. A., Xu J., Cheng C. R., Xu X. F., Fisher T. S., and Hu H. P., "Photoacoustic characterization of carbon nanotube array thermal interfaces," Journal of Applied Physics, vol.101 (2007).
9. Huang H., Lui C. H., Wu Y., and Fan S. S., "Aligned carbon nanotube composite films for thermal management," Advanced Materials, vol.17 (2005), pp. 1652-1653.
10. Panzer M. A., Zhang G., Mann D., Hu X., Pop E., Dai H., and Goodson K. E., "Thermal properties of metal-coated vertically aligned single-wall nanotube arrays," Journal of Heat Transfer-Transactions of the ASME, vol.130 (2008).
11. Sihn S., Ganguli S., Roy A. K., Qu L. T., and Dai L. M., "Enhancement of through-thickness thermal conductivity in adhesively bonded joints using aligned carbon nanotubes," Composites Science and Technology, vol.68 (2008), pp. 658-665.
12. Cola B. A., Xu X. F., and Fisher T. S., "Increased real contact in thermal interfaces: A carbon nanotube/foil material," Applied Physics Letters, vol.90 (2007).
13. Zhu L. B., Hess D. W., and Wong C. P., "Assembling Carbon Nanotube Films as Thermal Interface Materials," presented at Electronic Components and Technology Conference, 2007.
14. Lin W., Moon K. S, Wong C. P., "A Combined Process of In-Situ Functionalization and Microwave Treatment to Achieve Ultra-Small Thermal Expansion of Aligned Carbon Nanotube/Polymer Nanocomposites: toward Applications as Thermal Interface Materials," Advanced Materials, 2008, in press.
15. Wang B. A., Liu X. Y., Liu H. M., Wu D. X., Wang H. P., Jiang J. M., Wang X. B., Hu P. A., Liu Y. Q., and Zhu D. B., "Controllable preparation of patterns of aligned carbon nanotubes on metals and metal-coated silicon substrates," Journal of Materials Chemistry, vol.13 (2003), pp. 1124-1126.
16. Xu F. S., Liu X. F., and Tse S. D., "Synthesis of carbon nanotubes on metal alloy substrates with voltage bias in methane inverse diffusion flames," Carbon, vol.44 (2006), pp. 570-577.
17. Hofmeister W., Kang W. P., Wong Y. M., and Davidson J. L., "Carbon nanotube growth from Cu-Co alloys for field emission applications," Journal of Vacuum Science & Technology B, vol.22 (2004), pp. 1286-1289.
18. Karwa M., Iqbal Z., and Mitra S., "Scaled-up selfassembly of carbon nanotubes inside long stainless steel tubing," Carbon, vol.44 (2006), pp. 1235-1242.
19. Talapatra S., Kar S., Pal S. K., Vajtai R., Ci L., Victor P., Shaijumon M. M., Kaur S., Nalamasu O., and Ajayan P. M., "Direct growth of aligned carbon nanotubes on bulk metals," Nature Nanotechnology, vol.1 (2006), pp. 112-116.
20. Gao L. J., Peng A. P., Wang Z. Y., Zhang H., Shi Z. J., Gu Z. N., Cao G. P., and Ding B. Z., "Growth of aligned carbon nanotube arrays on metallic substrate and its application to supercapacitors," Solid State Communications, vol.146 (2008), pp. 380-383.
21. Singh M. K., Singh P. P., Titus E., Misra D. S., and LeNormand F., "High density of multiwalled carbon nanotubes observed on nickel electroplated copper substrates by microwave plasma chemical vapor deposition," Chemical Physics Letters, vol.354 (2002), pp. 331-336.
22. Wang H., Feng J. Y., Hu X. J., and Ng K. M., "Synthesis of aligned carbon nanotubes on double-sided metallic substrate by chemical vapor deposition," Journal of Physical Chemistry C, vol.111 (2007), pp. 12617-12624.
23. Yin X., Wang Q. L., Lou C. G., Zhang X. B., and Lei W., "Growth of multi-walled CNTs emitters on an oxygen-free copper substrate by chemical-vapor deposition," Applied Surface Science, vol.254 (2008), pp. 6633-6636.
24. Hu X. J., Padilla A. A., Xu J., Fisher T. S., and Goodson K. E., "3-omega measurements of vertically oriented carbon nanotubes on silicon," Journal of Heat Transfer- Transactions of the ASME, vol.128 (2006), pp. 1109-1113.
25. Son Y., Pal S. K., Borca-Tasciuc T., Ajayan P. M., and Siegel R. W., "Thermal resistance of the native interface between vertically aligned multiwalled carbon nanotube arrays and their SiO2/Si substrate," Journal of Applied Physics, vol.103 (2008).
26. Lin W., Xiu Y. G., Jiang H. J., Zhang R. W., Hildreth O., Moon K. S., and Wong C. P., "Self-assembled monolayerassisted chemical transfer of in situ functionalized carbon nanotubes," Journal of the American Chemical Society, vol.130 (2008), pp. 9636-9637.
27. Zhu L. B., Sun Y. Y., Hess D. W., and Wong C. P., "Well-aligned open-ended carbon nanotube architectures: An approach for device assembly," Nano Letters, vol.6 (2006), pp. 243-247.
28. Zhu L. B., Xiu Y. H., Hess D. W., and Wong C. P., "Aligned carbon nanotube stacks by water-assisted selective etching," Nano Letters, vol.5 (2005), pp. 2641-2645.
29. Hata K., Futaba D. N., Mizuno K., Namai T., Yumura M., and Iijima S., "Water-assisted highly efficient synthesis of impurity-free single-waited carbon nanotubes," Science, vol.306 (2004), pp. 1362-1364.
30. Powell C. F. et al, vapor deposition. New York: JOHN WILEY & SONS, INC., 1966.
31. de los Arcos T., Vonau F., Garnier M. G., Thommen V., Boyen H. G., Oelhafen P., Duggelin M., Mathis D., and Guggenheim R., "Influence of iron-silicon interaction on the growth of carbon nanotubes produced by chemical vapor deposition," Applied Physics Letters, vol.80 (2002), pp. 2383-2385.
32. Xiu Y. H., Zhang S., Yelundur V., Rohatgi A., Hess D. W., and Wong C. P., "Superhydrophobic and low light reflectivity silicon surfaces fabricated by hierarchical etching," Langmuir, vol.24 (2008), pp. 10421-10426.
33. Pisana S., Cantoro M., Parvez A., Hofmann S., Ferrari A. C., and Robertson J., "The role of precursor gases on thesurface restructuring of catalyst films during carbon nanotube growth," Physica E-Low-Dimensional Systems & Nanostructures, vol.37 (2007), pp. 1-5.
34. Rodriguez N. M., "A Review of Catalytically Grown Carbon Nanofibers," Journal of Materials Research, vol.8 (1993), pp. 3233-3250.
35. Deck C. P. and Vecchio K., "Prediction of carbon nanotube growth success by the analysis of carboncatalyst binary phase diagrams," Carbon, vol.44 (2006), pp. 267-275.
36. Deng W. Q., Xu X., and Goddard W. A., "A two-stage mechanism of bimetallic catalyzed growth of singlewalled carbon nanotubes," Nano Letters, vol.4 (2004), pp. 2331-2335.
37. Krishnankutty N., Park C., Rodriguez N. M., and Baker R. T. K., "The effect of copper on the structural characteristics of carbon filaments produced from iron catalyzed decomposition of ethylene," Catalysis Today, vol.37 (1997), pp. 295-307.
38. Almazouzi A., Macht M. P., Naundorf V., and Neumann G., "Diffusion of iron and nickel in single-crystalline copper," Physical Review B, vol.54 (1996), pp. 857-863.
39. Kononchuk O. Korablev K. G., Yarykin N., and Rozgonyi G. A., "Diffusion of iron in the silicon dioxide layer of silicon-on-insulator structures," Applied Physics Letters, vol.73 (1998), pp. 1206-1208.
40. Groner M. D., Elam J. W., Fabreguette F. H., and George S. M., "Electrical characterization of thin Al2O3 films grown by atomic layer deposition on silicon and various metal substrates," Thin Solid Films, vol.413 (2002), pp. 186-197.
41. Puurunen R. L., "Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process," Journal of Applied Physics, vol.97 (2005).
42. Rahtu A., Alaranta T., and Ritala M., "In situ quartz crystal microbalance and quadrupole mass spectrometry studies of atomic layer deposition of aluminum oxide from trimethylaluminum and water," Langmuir, vol.17 (2001), pp. 6506-6509.
43. Qu L. and Dai L., "Gecko-foot-mimetic aligned singlewalled carbon nanotube dry adhesives with unique electrical and thermal properties," Advanced Materials, vol.19 (2007), pp. 3844-3845.
44. Hone J., Batlogg B., Benes Z., Johnson A. T., and Fischer J. E., "Quantized phonon spectrum of single-wall carbon nanotubes," Science, vol.289 (2000), pp. 1730-1733. (Pubitemid 30683634)