〈 100 〉 n -type metal-oxide-semiconductor field-effect transistor-embedded microcantilever sensor for observing the kinetics of chemical molecules interaction

Applied Physics Letters

Volumn 95, Issue 12, 2009, Pages

  Wang, Jian ^a   Wu, Wengang ^a   Huang, Ying ^a   Hao, Yilong ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER SENSORS; CHEMICAL INTERACTIONS; CHEMICAL MOLECULES; GAINING INSIGHTS; GOLD COATINGS; INTERMOLECULAR INTERACTIONS; LANGMUIR MODELS; METAL-OXIDE-SEMICONDUCTOR FIELD-EFFECT TRANSISTOR; MICRO CANTILEVER SENSORS; NMOSFET; NMOSFETS; OUTPUT SIGNAL; SILICON CANTILEVER; SURFACE STRESS; SURFACE STRESS SENSING;

ACETONE; ATOMIC FORCE MICROSCOPY; COMPOSITE MICROMECHANICS; CRYSTAL ORIENTATION; DIELECTRIC DEVICES; ETHANOL; FIELD EFFECT TRANSISTORS; MICROSENSORS; MOLECULES; NANOCANTILEVERS; PROTECTIVE COATINGS; SEMICONDUCTING SILICON; SURFACE PROPERTIES;

MOSFET DEVICES;

EID: 70349658590     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3231074     Document Type: Article

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