Characterization of an integrated force sensor based on a MOS transistor for applications in scanning force microscopy

Sensors and Actuators, A: Physical

Volumn 64, Issue 1, 1998, Pages 1-6

  Akiyama, Terunobu ^a   Tonin, Andreas ^b   Hidber, Hans Rudolf ^b   Brugger, Jürgen ^c   Vettiger, Peter ^c   Staufer, Urs ^a   De Rooij, Nico F ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^b UNIVERSITY OF BASEL   (Switzerland)

^c IBM RESEARCH ZURICH   (Switzerland)

Author keywords

Cantilevers; Force sensors; Mos transistors; Scanning force microscopy

Indexed keywords

CMOS INTEGRATED CIRCUITS; MICROSCOPIC EXAMINATION; MOSFET DEVICES; NATURAL FREQUENCIES;

CANTILEVERS; INTEGRATED FORCE SENSOR; SCANNING FORCE MICROSCOPY;

SENSORS;

EID: 0031647458     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)80051-4     Document Type: Article

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