Dry-film technology as a standard process for passive optical alignment of silicon photonics devices

Proceedings - Electronic Components and Technology Conference

Volumn , Issue , 2009, Pages 1914-1919

  Kopp, Christophe ^a   Bernabé, Stéphane ^a   Philippe, Paul ^a  

^a CEA GRENOBLE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

FILM STRUCTURE; FILM TECHNOLOGY; INTEGRATED OPTICAL DEVICES; LOW COSTS; MASS PRODUCTION; MICROELECTRONIC INDUSTRY; OPTICAL ALIGNMENTS; PARALLEL OPTICS; SILICON NANOWIRES; SILICON PHOTONICS; SMART SOLUTIONS; TRANSFER TECHNIQUE; VERTICAL GRATINGS;

ELECTRIC WIRE; INTEGRATED CIRCUITS; MACHINE TOOLS; OPTICAL FIBERS; OPTICAL INSTRUMENTS; OPTICAL MATERIALS; PHOTONIC DEVICES; PRODUCTION ENGINEERING;

TECHNOLOGY;

EID: 70349656033     PISSN: 05695503     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ECTC.2009.5074281     Document Type: Conference Paper

References (18)

1. R. A. Boudreau, S.M Boudreau, Passive Micro-optical Alignment Methods, Taylor and Francis, (2005)
2. K. Yamauchi et al., "Automated Mass production line for optical modules using passive alignment technique", , Proc 50th Electronic Components and Technology Conf , 2000
3. M.Owen, "Agilent Technologies' Singlemode Small Form Factor (SFF) Module Incorporates Micromachined Silicon, Automated Passive Alignment, and Non-Hermetic Packaging to Enable the Next Generation of Low-Cost Fiber Optic Transceivers", IEEE Trans. On Adv. Pkg. , 23, 2, 2000
4. D.W. Sherrer et al. , "Wafer-Level Packaging Technology for 10Gbps TOSAs", Proc 55th Electronic Components and Technology Conf, 2005
5. T. Ouchi et al. , "Direct Coupling of VCSELs to Plastic Optical Fibers Using Guide Holes Patterned in a Thick Photoresist", IEEE Photonics Tech. Letters, 14, 3, 2002
6. F. Van Laere et al., "Compact and Highly Efficient Grating Couplers Between Optical Fiber and Nanophotonic Waveguides" , IEEE J. of Lightwave Tech., 25, 1, 2007
7. Pinguet T. et al., "Monolithically Integrated High-Speed CMOS Photonic Transceivers", Proc IEEE/LEOS, 2008
8. Joyce W.B, De Loach B.C, "Alignment of Gaussian Beams", Applied Optics, 23, 23 (1984)
9. Kopp C. et al. "Silicon photonics packaging: characterization of a waveguide grating coupler and modeling of the fiber coupling ratio", Proceedings of SPIE, the International Society for Optical Engineering, vol.6478 2007
10. Sure A. et al. , "Fabrication and characterization of threedimensional silicon tapers", Optics Express 11(26), 3555-3561, 2003
11. Choudhury A. et al., "Method of improving light coupling efficiency between optical fibers and silicon waveguides", IEEE Photonics Technology Letters 17(9), 1881-1883 (2005)
12. Orobtchouk R. et al., "New ARROW optical coupler for optical interconnect", Proceedings of the IEEE, 233-235 (2003)
13. Masanovic G.Z., V.M.N. Passaro V.M.N., G.T. Reed G.T., "Coupling to nanophotonic waveguides using dualassisted directional coupler", IEEE Proceedings Optoelectronics, 152(1), 41-48 , 2005
14. Shoji T. et al., "Spot-size converter for low-loss coupling between 0.3- mu m-square Si wire waveguides and singlemode fibers", IEEE/LEOS Annual Meeting Conference Proceedings, 289-290, 2002
15. Roelkens G. et al., "P. Dumon, W. Bogaerts, D. Van- Thourhout, R. Baets, Efficient silicon-on-insulator fiber coupler fabricated using 248-nm-deep UV lithography", IEEE Photonics Technology Letters 17(12), 2613-2615, 2005
16. Vivien L. et al. , "Light injection in SOI microwaveguides using high-efficiency grating couplers", Journal of Ligthwave technology 24(10), 3810-3815, 2006
17. Taillaert D. et al., "An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers", IEEE Journal of Quantum Electronics 38(7), 949-955 (2002)
18. Taillaert D. et al., "A compact two-dimensional grating coupler used as a polarization splitter", IEEE Photonics Technology Letters 15(9), 1249-1251, 2003