Spot-size converter for low-loss coupling between 0.3-μm-square Si wire waveguides and single-mode fibers

Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

Volumn 1, Issue , 2002, Pages 289-290

  Shoji, T ^a   Tsuchizawa, T ^a   Watanabe, T ^a   Yamada, K ^a   Morita, H ^a  

^a NTT CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; ETCHING; INSERTION LOSSES; LIGHT TRANSMISSION; OPTICAL WAVEGUIDES; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR LASERS; SILICON ON INSULATOR TECHNOLOGY; SINGLE MODE FIBERS;

ELECTRON-CYCLOTRON-RESONANCE PLASMA ION ETCHING; OPTICAL LOW-COHERENCE REFLECTOMETRY; SILICON WIRE WAVEGUIDES; SPOT-SIZE CONVERTERS;

ELECTRIC CONVERTERS;

EID: 0036929227     PISSN: 10928081     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. A. Sakai G. Hara and T. Baba: "Propagation Characteristics of Ultrahigh-Δ Optical Waveguide on Silicon-on-Insulator Substrate", J. J. A. P. Vol. 40, 383, 2001
2. Y. Shanai, C. H. Henry, R. C. Kistler, K. J. Orowsky, and D. A. Ackerman: "Efficient coupling of a semiconductor laser to an optical fiber by means of a tapered waveguide on silicon", Appl. Phys. Lett., Vol. 55, No. 23, 4 December 1989
3. K. K. Lee, D. R. Lim, H.-C Luan, A. Agarwal, J. Foresi, and L. C. Kimerling: "Effect of size and roughness on light transmission in Si/SiO2 waveguide: Experiment and model", Appl. Phys. Lett., Vol. 77, No. 11, 11 September 2000