-
1
-
-
70349523443
-
-
U.S. Patent No. 4,851,683 (25 July).
-
F. J. Yang, P. B. Farnsworth, K. E. Markides, M. L. Lee, and R. J. Skelton, Jr., U.S. Patent No. 4,851,683 (25 July 1989).
-
(1989)
-
-
Yang, F.J.1
Farnsworth, P.B.2
Markides, K.E.3
Lee, M.L.4
Skelton, Jr.R.J.5
-
2
-
-
70349544322
-
-
U.S. Patent No. 5,009,099 (23 April).
-
G. J. Wells and B. A. Bolton, U.S. Patent No. 5,009,099 (23 April 1991).
-
(1991)
-
-
Wells, G.J.1
Bolton, B.A.2
-
4
-
-
27744602979
-
-
0963-0252,. 10.1088/0963-0252/14/4/015
-
V. I. Arkhipenko, A. A. Kirillov, L. V. Simonchik, and S. M. Zgirouski, Plasma Sources Sci. Technol. 0963-0252 14, 757 (2005). 10.1088/0963-0252/14/4/ 015
-
(2005)
Plasma Sources Sci. Technol.
, vol.14
, pp. 757
-
-
Arkhipenko, V.I.1
Kirillov, A.A.2
Simonchik, L.V.3
Zgirouski, S.M.4
-
6
-
-
33750831224
-
Design and development of a package using LCP for RF/microwave MEMS switches
-
DOI 10.1109/TMTT.2006.884639, 1717772
-
M. J. Chen, A. -V. H. Pham, N. A. Evers, C. Kapusta, J. Iannotti, W. Kornrumpf, J. J. Maciel, and N. Karabudak, IEEE Trans. Microwave Theory Tech. 0018-9480 54, 4009 (2006). 10.1109/TMTT.2006.884639 (Pubitemid 44711641)
-
(2006)
IEEE Transactions on Microwave Theory and Techniques
, vol.54
, Issue.11
, pp. 4009-4015
-
-
Chen, M.J.1
Pham, A.-V.H.2
Evers, N.A.3
Kapusta, C.4
Iannotti, J.5
Kornrumpf, W.6
Maciel, J.J.7
Karabudak, N.8
-
7
-
-
0030127680
-
Chemical pumping in vacuum technology
-
DOI 10.1016/0042-207X(95)00252-9
-
B. Ferrario, Vacuum 0042-207X 47, 363 (1996). 10.1016/0042-207X(95)00252- 9 (Pubitemid 126374798)
-
(1996)
Vacuum
, vol.47
, Issue.4
, pp. 363-370
-
-
Ferrario, B.1
-
9
-
-
0028426115
-
-
0924-4247,. 10.1016/0924-4247(94)80003-0
-
H. Henmi, S. Shoji, Y. Shoji, K. Yoshimi, and M. Esashi, Sens. Actuators, A 0924-4247 43, 243 (1994). 10.1016/0924-4247(94)80003-0
-
(1994)
Sens. Actuators, A
, vol.43
, pp. 243
-
-
Henmi, H.1
Shoji, S.2
Shoji, Y.3
Yoshimi, K.4
Esashi, M.5
-
10
-
-
70349546424
-
-
SAES Getters.
-
http://www.saesgetters.com/default, SAES Getters.
-
-
-
-
11
-
-
34548237353
-
Performance characterization of nonevaporable porous Ti getter films
-
DOI 10.1116/1.2757177
-
C. Li, J. Huang, R. Lin, D. Lii, and C. Chen, J. Vac. Sci. Technol. A 0734-2101 25, 1373 (2007). 10.1116/1.2757177 (Pubitemid 47330600)
-
(2007)
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
, vol.25
, Issue.5
, pp. 1373-1380
-
-
Li, C.-C.1
Huang, J.-L.2
Lin, R.-J.3
Lii, D.-F.4
Chen, C.-H.5
-
12
-
-
52249101496
-
-
IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 07), Kobe, Japan, 21-25 January (unpublished)
-
S. A. Wright and Y. B. Gianchandani, IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 07), Kobe, Japan, 21-25 January 2007 (unpublished), p. 115.
-
(2007)
, pp. 115
-
-
Wright, S.A.1
Gianchandani, Y.B.2
-
15
-
-
0142112817
-
-
0022-5355,. 10.1116/1.1492540
-
D. R. Denison, J. Vac. Sci. Technol. 0022-5355 4, 156 (1967). 10.1116/1.1492540
-
(1967)
J. Vac. Sci. Technol.
, vol.4
, pp. 156
-
-
Denison, D.R.1
-
16
-
-
47849097365
-
-
1530-437X,. 10.1109/JSEN.2008.920720
-
B. Mitra and Y. B. Gianchandani, IEEE Sens. J. 1530-437X 8, 1445 (2008). 10.1109/JSEN.2008.920720
-
(2008)
IEEE Sens. J.
, vol.8
, pp. 1445
-
-
Mitra, B.1
Gianchandani, Y.B.2
-
17
-
-
50249169955
-
-
0093-3813,. 10.1109/TPS.2008.927135
-
B. Mitra, B. Levey, and Y. B. Gianchandani, IEEE Trans. Plasma Sci. 0093-3813 36, 1913 (2008). 10.1109/TPS.2008.927135
-
(2008)
IEEE Trans. Plasma Sci.
, vol.36
, pp. 1913
-
-
Mitra, B.1
Levey, B.2
Gianchandani, Y.B.3
-
19
-
-
0642365430
-
-
0370-1298,. 10.1088/0370-1298/63/6/302
-
M. W. Feast, Proc. Phys. Soc., London, Sect. A 0370-1298 63, 557 (1950). 10.1088/0370-1298/63/6/302
-
(1950)
Proc. Phys. Soc., London, Sect. A
, vol.63
, pp. 557
-
-
Feast, M.W.1
|