메뉴 건너뛰기




Volumn 95, Issue 11, 2009, Pages

Contaminant gas removal using thin-film Ti electrode microdischarges

Author keywords

[No Author keywords available]

Indexed keywords

GAS ENVIRONMENT; GAS REMOVAL; MICRODISCHARGES; OPTICAL EMISSIONS; OXYGEN CONCENTRATIONS; SEALED CAVITIES; TI ELECTRODE;

EID: 70349481162     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3226679     Document Type: Article
Times cited : (5)

References (20)
  • 2
    • 70349544322 scopus 로고
    • U.S. Patent No. 5,009,099 (23 April).
    • G. J. Wells and B. A. Bolton, U.S. Patent No. 5,009,099 (23 April 1991).
    • (1991)
    • Wells, G.J.1    Bolton, B.A.2
  • 7
    • 0030127680 scopus 로고    scopus 로고
    • Chemical pumping in vacuum technology
    • DOI 10.1016/0042-207X(95)00252-9
    • B. Ferrario, Vacuum 0042-207X 47, 363 (1996). 10.1016/0042-207X(95)00252- 9 (Pubitemid 126374798)
    • (1996) Vacuum , vol.47 , Issue.4 , pp. 363-370
    • Ferrario, B.1
  • 10
    • 70349546424 scopus 로고    scopus 로고
    • SAES Getters.
    • http://www.saesgetters.com/default, SAES Getters.
  • 12
    • 52249101496 scopus 로고    scopus 로고
    • IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 07), Kobe, Japan, 21-25 January (unpublished)
    • S. A. Wright and Y. B. Gianchandani, IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 07), Kobe, Japan, 21-25 January 2007 (unpublished), p. 115.
    • (2007) , pp. 115
    • Wright, S.A.1    Gianchandani, Y.B.2
  • 15
    • 0142112817 scopus 로고
    • 0022-5355,. 10.1116/1.1492540
    • D. R. Denison, J. Vac. Sci. Technol. 0022-5355 4, 156 (1967). 10.1116/1.1492540
    • (1967) J. Vac. Sci. Technol. , vol.4 , pp. 156
    • Denison, D.R.1
  • 16
    • 47849097365 scopus 로고    scopus 로고
    • 1530-437X,. 10.1109/JSEN.2008.920720
    • B. Mitra and Y. B. Gianchandani, IEEE Sens. J. 1530-437X 8, 1445 (2008). 10.1109/JSEN.2008.920720
    • (2008) IEEE Sens. J. , vol.8 , pp. 1445
    • Mitra, B.1    Gianchandani, Y.B.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.