A harsh environment, multi-plasma microsystem with pressure sensor, gas purifier, and chemical detector

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 115-118

  Wright, Scott A ^a   Gianchandani, Yogesh B ^b  

^a UNIVERSITY OF MICHIGAN   (United States)

^b NONE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL DETECTION; GASES; LIGHT EMISSION; MEMS; METAMATERIALS; NITROGEN; PLASMA DEVICES; PRESSURE SENSORS;

CURRENT DISTRIBUTION; HARSH ENVIRONMENT; LINE EMISSION INTENSITY; NITROGEN CONCENTRATIONS; OPTICAL EMISSIONS; SPECTRAL DETECTION; SPECTRAL ENHANCEMENT; THIN-FILM ELECTRODE;

AIR PURIFICATION;

EID: 52249101496     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.2007.4433029     Document Type: Conference Paper

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