Investigation of evanescent coupling between SOI waveguides and heterogeneously-integrated III-V pin photodetectors

Conference Proceedings - International Conference on Indium Phosphide and Related Materials

Volumn , Issue , 2009, Pages 159-162

  Zhen, Sheng ^a,b   Liu, Liu ^a   Brouckaert, Joost ^a   Sailing, He ^b   Van Thourhout, Dries ^a   Baets, Roel ^a  

^a GHENT UNIVERSITY   (Belgium)

^b ZHEJIANG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EVANESCENT COUPLING; HETEROGENEOUS INTEGRATION; LOW TEMPERATURES; METAL CONTACTS; OPTICAL FUNCTION; P-I-N PHOTODETECTORS; SILICON CHIP; SOI WAVEGUIDES; WAFER BONDING PROCESS;

ABSORPTION; INDIUM PHOSPHIDE; INTEGRATION; OPTOELECTRONIC DEVICES; PHOTODETECTORS; SEMICONDUCTING INDIUM; WAFER BONDING; WAVEGUIDES;

SILICON WAFERS;

EID: 70349480588     PISSN: 10928669     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICIPRM.2009.5012467     Document Type: Conference Paper

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