Ablation characteristics of aluminum oxide and nitride ceramics during femtosecond laser micromachining

Applied Surface Science

Volumn 255, Issue 24, 2009, Pages 9717-9720

  Kim, Sung Hoon ^a   Sohn, Ik Bu ^a   Jeong, Sungho ^a  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

Author keywords

Alumina; Aluminum nitride; Ceramic; Femtosecond laser ablation

Indexed keywords

ABLATION; ALUMINA; ALUMINUM NITRIDE; CERAMIC MATERIALS; CHEMICAL ANALYSIS; FEMTOSECOND LASERS; III-V SEMICONDUCTORS; LASER ABLATION; MELTING; NITRIDES; PULSE REPETITION RATE; X RAY PHOTOELECTRON SPECTROSCOPY;

ALUMINUM NITRIDE CERAMICS; ATMOSPHERIC CONDITIONS; CERAMIC; FEMTOSECOND LASER MICROMACHINING; MULTIPULSES; NITRIDE CERAMICS; REPETITION RATE; THRESHOLD LASERS;

ALUMINUM OXIDE;

EID: 70349440762     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2009.04.058     Document Type: Article

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