메뉴 건너뛰기




Volumn 17, Issue 19, 2009, Pages 16625-16631

Five beam holographic lithography for simultaneous fabrication of three dimensional photonic crystal templates and line defects using phase tunable diffractive optical element

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL LATTICES; DEFECTS; DENSITY (OPTICAL); DIFFRACTION GRATINGS; DIFFRACTIVE OPTICAL ELEMENTS; ENERGY GAP; FABRICATION; GLASS; HOLOGRAPHY; LIGHT SENSITIVE MATERIALS; LITHOGRAPHY; OPTICAL LATTICES; PHOTONIC CRYSTALS; PHOTONICS; PHOTORESISTS;

EID: 70349204201     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.17.016625     Document Type: Article
Times cited : (34)

References (19)
  • 1
    • 26544437684 scopus 로고
    • Strong localization of photons in certain disordered dielectric superlattices
    • S. John, "Strong localization of photons in certain disordered dielectric superlattices," Phys. Rev. Lett. 58(23), 2486-2489 (1987).
    • (1987) Phys. Rev. Lett. , vol.58 , Issue.23 , pp. 2486-2489
    • John, S.1
  • 2
    • 33745947692 scopus 로고
    • Inhibited spontaneous emission in solid-state physics and electronics
    • E. Yablonovitch, "Inhibited spontaneous emission in solid-state physics and electronics," Phys. Rev. Lett. 58(20), 2059-2062 (1987).
    • (1987) Phys. Rev. Lett. , vol.58 , Issue.20 , pp. 2059-2062
    • Yablonovitch, E.1
  • 3
    • 0028374710 scopus 로고
    • Photonic band gaps in three dimensions: New layer-by-layer periodic structures
    • K. M. Ho, C. T. Chan, C. M. Soukoulis, R. Biswas, and M. Sigalas, "Photonic band gaps in three dimensions: New layer-by-layer periodic structures," Solid State Commun. 89(5), 413-416 (1994).
    • (1994) Solid State Commun. , vol.89 , Issue.5 , pp. 413-416
    • Ho, K.M.1    Chan, C.T.2    Soukoulis, C.M.3    Biswas, R.4    Sigalas, M.5
  • 5
    • 3042839181 scopus 로고    scopus 로고
    • Direct laser writing of three-dimensional photonic-crystal templates for telecommunications
    • M. Deubel, G. von Freymann, M. Wegener, S. Pereira, K. Busch, and C. M. Soukoulis, "Direct laser writing of three-dimensional photonic-crystal templates for telecommunications," Nat. Mater. 3(7), 444-447 (2004).
    • (2004) Nat. Mater. , vol.3 , Issue.7 , pp. 444-447
    • Deubel, M.1    Von Freymann, G.2    Wegener, M.3    Pereira, S.4    Busch, K.5    Soukoulis, C.M.6
  • 6
    • 0034594907 scopus 로고    scopus 로고
    • Fabrication of photonic crystals for the visible spectrum by holographic lithography
    • M. Campbell, D. N. Sharp, M. T. Harrison, R. G. Denning, and A. J. Turberfield, "Fabrication of photonic crystals for the visible spectrum by holographic lithography," Nature 404(6773), 53-56 (2000).
    • (2000) Nature , vol.404 , Issue.6773 , pp. 53-56
    • Campbell, M.1    Sharp, D.N.2    Harrison, M.T.3    Denning, R.G.4    Turberfield, A.J.5
  • 7
    • 0036069030 scopus 로고    scopus 로고
    • Creating periodic threedimensional structures by multibeam interference of visible laser
    • S. Yang, M. Megens, J. Aizenberg, P. Wiltzius, P. M. Chaikin, and W. B. Russel, "Creating periodic threedimensional structures by multibeam interference of visible laser," Chem. Mater. 14(7), 2831-2833 (2002).
    • (2002) Chem. Mater. , vol.14 , Issue.7 , pp. 2831-2833
    • Yang, S.1    Megens, M.2    Aizenberg, J.3    Wiltzius, P.4    Chaikin, P.M.5    Russel, W.B.6
  • 9
    • 33748485632 scopus 로고    scopus 로고
    • Diamond photonic band gap synthesis by umbrella holographic lithography
    • O. Toader, T. Y. M. Chan, and S. John, "Diamond photonic band gap synthesis by umbrella holographic lithography," Appl. Phys. Lett. 89(10), 101-117 (2006).
    • (2006) Appl. Phys. Lett. , vol.89 , Issue.10 , pp. 101-117
    • Toader, O.1    Chan, T.Y.M.2    John, S.3
  • 10
    • 33746365376 scopus 로고    scopus 로고
    • Fabrication of photonic crystals with tunable surface orientation by holographic lithography
    • Y. Zhong, L. Wu, H. Su, K. S. Wong, and H. Wang, "Fabrication of photonic crystals with tunable surface orientation by holographic lithography," Opt. Express 14(15), 6837-6843 (2006), http://www. opticsinfobase.org/oe/abstract.cfm?URI=oe-14-15-6837.
    • (2006) Opt. Express , vol.14 , Issue.15 , pp. 6837-6843
    • Zhong, Y.1    Wu, L.2    Su, H.3    Wong, K.S.4    Wang, H.5
  • 11
    • 33749391591 scopus 로고    scopus 로고
    • Realization of woodpile structure using optical interference holography
    • Y. K. Pang, J. C. Lee, C. T. Ho, and W. Y. Tam, "Realization of woodpile structure using optical interference holography," Opt. Express 14(20), 9113-9119 (2006), http://www.opticsinfobase.org/abstract.cfm?URI=oe- 1420-9113.
    • (2006) Opt. Express , vol.14 , Issue.20 , pp. 9113-9119
    • Pang, Y.K.1    Lee, J.C.2    Ho, C.T.3    Tam, W.Y.4
  • 12
    • 17044405971 scopus 로고    scopus 로고
    • Design and holographic fabrication of tetragonal and cubic photonic crystals with phase mask: Toward the mass-production of three-dimensional photonic crystals
    • Y. Lin, P. R. Herman, and K. Darmawikarta, "Design and holographic fabrication of tetragonal and cubic photonic crystals with phase mask: toward the mass-production of three-dimensional photonic crystals," Appl. Phys. Lett. 86(7), 071117 (2005).
    • (2005) Appl. Phys. Lett. , vol.86 , Issue.7 , pp. 071117
    • Lin, Y.1    Herman, P.R.2    Darmawikarta, K.3
  • 13
    • 45249117838 scopus 로고    scopus 로고
    • Fabrication of two-layer integrated phase mask for single-beam and single-exposure fabrication of three-dimensional photonic crystal
    • Y. Lin, A. Harb, D. Rodriguez, K. Lozano, D. Xu, and K. P. Chen, "Fabrication of two-layer integrated phase mask for single-beam and single-exposure fabrication of three-dimensional photonic crystal," Opt. Express 16(12), 9165-9172 (2008), http://www.opticsinfobase.org/oe/abstract.cfm? URI=oe-16-12-9165.
    • (2008) Opt. Express , vol.16 , Issue.12 , pp. 9165-9172
    • Lin, Y.1    Harb, A.2    Rodriguez, D.3    Lozano, K.4    Xu, D.5    Chen, K.P.6
  • 14
    • 54749153652 scopus 로고    scopus 로고
    • Multi-level diffractive optics for single laser exposure fabrication of telecom-band diamond-like 3-dimensional photonic crystals
    • D. Chanda, L. E. Abolghasemi, M. Haque, M. L. Ng, and P. R. Herman, "Multi-level diffractive optics for single laser exposure fabrication of telecom-band diamond-like 3-dimensional photonic crystals," Opt. Express 16(20), 15402-15414 (2008), http://www.opticsinfobase.org/oe/abstract.cfm?URI= oe-16-20-15402.
    • (2008) Opt. Express , vol.16 , Issue.20 , pp. 15402-15414
    • Chanda, D.1    Abolghasemi, L.E.2    Haque, M.3    Ng, M.L.4    Herman, P.R.5
  • 15
    • 20844443281 scopus 로고    scopus 로고
    • Diffraction element assisted lithography: Pattern control for photonic crystal fabrication
    • C. Lu, X. K. Hu, I. V. Mitchell, and R. H. Lipson, "Diffraction element assisted lithography: Pattern control for photonic crystal fabrication," Appl. Phys. Lett. 86(19), 193110 (2005).
    • (2005) Appl. Phys. Lett. , vol.86 , Issue.19 , pp. 193110
    • Lu, C.1    Hu, X.K.2    Mitchell, I.V.3    Lipson, R.H.4
  • 17
    • 50049132903 scopus 로고    scopus 로고
    • Fabrication of photonic crystals with functional defects by one-step holographic lithography
    • J. Li, Y. Liu, X. Xie, P. Zhang, B. Liang, L. Yan, J. Zhou, G. Kurizki, D. Jacobs, K. S. Wong, and Y. Zhong, "Fabrication of photonic crystals with functional defects by one-step holographic lithography," Opt. Express 16(17), 12899-12904 (2008), http://www.opticsinfobase.org/oe/abstract.cfm?URI= oe-16-17-12899.
    • (2008) Opt. Express , vol.16 , Issue.17 , pp. 12899-12904
    • Li, J.1    Liu, Y.2    Xie, X.3    Zhang, P.4    Liang, B.5    Yan, L.6    Zhou, J.7    Kurizki, G.8    Jacobs, D.9    Wong, K.S.10    Zhong, Y.11
  • 18
    • 0037451317 scopus 로고    scopus 로고
    • Fabrication of three-dimensional polymer photonic crystal structures using single diffraction element interference lithography
    • I. Divliansky, T. S. Mayer, K. S. Holliday, and V. H. Crespi, "Fabrication of three-dimensional polymer photonic crystal structures using single diffraction element interference lithography," Appl. Phys. Lett. 82(11), 1667-1669 (2003).
    • (2003) Appl. Phys. Lett. , vol.82 , Issue.11 , pp. 1667-1669
    • Divliansky, I.1    Mayer, T.S.2    Holliday, K.S.3    Crespi, V.H.4
  • 19
    • 28044443843 scopus 로고    scopus 로고
    • Translation of interference pattern by phase shift for diamond photonic crystals
    • J. Moon, S. Yang, D. Pine, and S. M. Yang, "Translation of interference pattern by phase shift for diamond photonic crystals," Opt. Express 13(24), 9841-9846 (2005), http://www,opticsinfobase,org/oe/abstract,cfm? URI=oe-13-24-9841.
    • (2005) Opt. Express , vol.13 , Issue.24 , pp. 9841-9846
    • Moon, J.1    Yang, S.2    Pine, D.3    Yang, S.M.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.