Diffraction element assisted lithography: Pattern control for photonic crystal fabrication

Applied Physics Letters

Volumn 86, Issue 19, 2005, Pages 1-3

  Lu, Cheng ^a   Hu, X K ^a   Mitchell, I V ^a   Lipson, R H ^a  

^a UNIVERSITY OF WESTERN ONTARIO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION PATTERNS; LATTICE PATTERNS; PHOTONIC BAND GAPS; PHOTONIC CRYSTALS;

ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; CRYSTALLOGRAPHY; ELECTROMAGNETIC WAVE DIFFRACTION; HOLOGRAPHY; LASERS; MICROSTRUCTURE; NEODYMIUM LASERS; PHOTORESISTS; Q SWITCHED LASERS; SCANNING ELECTRON MICROSCOPY; TWO DIMENSIONAL;

PHOTOLITHOGRAPHY;

EID: 20844443281     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1924894     Document Type: Article

References (27)

1. J. D. Joannopoulos, P. R. Villeneuve, and S. Fan, Nature (London) 386, 143 (1997).
2. K. Sakoda, Phys. Rev. B 52, 8992 (1995).
3. L. Zavieh and T. Mayer, Appl. Phys. Lett. 75, 2533 (1999).
4. S. Kawakami, T. Kawashima, and T. Sato, Appl. Phys. Lett. 74, 463 (1999).
5. S. Noda, K. Tomoda, N. Yamamoto, and A. Chutian, Science 289, 604 (2000).
6. S. Y. Lin, J. G. Fleming, D. L. Hetherington, B. K. Smith, R. Biswas, K. M. Ho, M. M. Sigalas, W. Zubrzycki, S. R. Kurtz, and J. Bur, Nature (London) 394, 251 (1998).
7. M. Campbell, D. N. Sharp, M. T. Harrison, R. G. Denning, and A. J. Turberfield, Nature (London) 404, 53 (2000).
8. Y. A. Vlasov, X.-Z. Bo, J. C. Sturm, and D. J. Norris Nature (London) 414, 289 (2001).
9. A. Blanco, E. Chomski, S. Grabtchak, M. Ibisate, S. John, S. W. Leonard, C. Lopez, F. Meseguer, H. Miguez, J. P. Mondia, G. A. Ozin, O. Toader, and H. M. van Driel, Nature (London) 405, 437 (2000).
10. E. Kuramochi, M. Notomi, T. Kawashima, J. Takahashi, C. Takahashi, T. Tamamura, and S. Kawakami, Opt. Quantum Electron. 34, 53 (2002).
11. S. G. Johnson and J. D. Joannopoulos Appl. Phys. Lett. 77, 3490 (2000).
12. J. G. Fleming, S. Y. Lin, I. El-Kady, R. Biswas, and K. M. Ho, Nature (London) 417, 52 (2002).
13. M. Maldovan, C. K. Ullal, W. C. Carter, and E. L. Thomas, Nat. Mater. 2, 664 (2003).
14. M. Deubel, G. von Freymann, M. Wegener, S. Pereira, K. Busch and C. M. Soukoulis, Nat. Mater. 3, 444 (2004).
15. O. Painter, R. K. Lee, A. Scherer, A. Yariv, J. D. O'Brien, P. D. Dapkus, and I. Kim, Science 284, 1819 (1999).
16. S. M. Spillane, T. J. Kippenberg, and K. J. Vahala Nature (London) 415, 621 (2002).
17. V. Berger, O. Giathyier-Lafaye, and E. J. Costard, J. Appl. Phys. 82, 60 (1997).
18. I. Divliansky, T. S. Mayer, K. S. Holliday, and V. H. Crespi, Appl. Phys. Lett. 82, 1667 (2003).
19. M. D. Levenson, N. S. Viswanthan, and R. A. Simpson, IEEE Trans. Electron Devices ED-29, 1828 (1982).
20. J. A. Rogers, K. E. Paul, R. J. Jackman, and G. M. Whitesides, Appl. Phys. Lett. 70, 2658 (1997).
21. J. A. Rogers, K. E. Paul, R. J. Jackman, and G. M. Whitesides, J. Vac. Sci. Technol. B 16, 59 (1998).
22. S. Y. Chou, C. Keimel, and J. Gu, Nature (London) 417, 835 (2002).
23. R. Riehn, A. Charas, J. Morgado, and F. Cacialli, Appl. Phys. Lett. 82, 526 (2003).
24. F. Cacialli, R. Riehn, A. Downes, G. Latini, A. Charas, and J. Morgado, Ultramicroscopy 100, 449 (2004).
25. K. O. Hill, B. Malo, F. Bilodeau, D. C. Johnson, and J. Albert, Appl. Phys. Lett. 62, 1035 (1993).
26. K. Iizuka, Engineering Optics, 2nd ed., Springer Series in Optical Sciences, Vol. 35 (Springer, Berlin, 1987).
27. M. Fritz, B. Tyrrell, D. Astolfi, D. Yost, P. Davis, B. Wheeler, R. Mallen, J. Jarmolowicz, D. Chan, P. Rhyins, C. Carney, J. Ferri, B. A. Blachowicz, J. Vac. Sci. Technol. B 19, 2366 (2001).