Microprobe analysis of Pt films deposited by beam induced reaction

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 12 B, 1998, Pages 7042-7046

  Park, Yang Keun ^a   Takai, Mikio ^a   Lehrer, Christoph ^b   Frey, Lothar ^b   Ryssel, Heiner ^b  

^a OSAKA UNIVERSITY   (Japan)

^b FRAUNHOFER INSTITUTE FOR INTEGRATED CIRCUITS IIS   (Germany)

Author keywords

Deposition; Electron beam (EB); Focused ion beam (FIB); Incorporation; Micro RBS; RBS mapping image

Indexed keywords

EID: 4243307043     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.7042     Document Type: Article

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