Micromachined gas inertial sensor based on convection heat transfer

Sensors and Actuators, A: Physical

Volumn 130-131, Issue SPEC. ISS., 2006, Pages 68-74

  Zhu, Rong ^a   Ding, Henggao ^a   Su, Yan ^b   Zhou, Zhaoying ^a  

^a TSINGHUA UNIVERSITY   (China)

^b SOUTHEAST UNIVERSITY   (China)

Author keywords

Convection heat transfer; Inertial sensor; Micro electromechanical system (MEMS)

Indexed keywords

ACCELEROMETERS; COMPUTER SIMULATION; ETCHING; GYROSCOPES; HEAT CONVECTION; HEAT TRANSFER; SILICON;

CONVECTION HEAT TRANSFER; INERTIAL SENSOR; MICRO ELECTROMECHANICAL SYSTEM (MEMS);

SENSORS;

EID: 33745830814     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.11.022     Document Type: Article

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