Two-photon microfabrication with a supercritical CO2 drying process toward replication of three-dimensional microstructures

2007 International Symposium on Micro-NanoMechatronics and Human Science, MHS

Volumn , Issue , 2007, Pages 12-15

  Hasegawa, Takuya ^a   Maruo, Shoji ^a,b  

^a YOKOHAMA NATIONAL UNIVERSITY   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEWATERING; FABRICATION; MICROANALYSIS; MICROFABRICATION; MICROMACHINING; MICROSTRUCTURE; MULTIPHOTON PROCESSES; OPTICAL DESIGN; PHOTONICS; PHOTONS; SOCIAL SCIENCES; SURFACE CHEMISTRY; SURFACE TENSION;

BIOCHIP TECHNOLOGIES; CLOSED LOOPS; DRYING PROCESSES; HUMAN SCIENCES; INTERNATIONAL SYMPOSIUM; MASTER MODEL; MICRO-DEVICES; MICROTRANSFER; NANO-PHOTONICS; NANOMECHATRONICS; SUPER-CRITICAL; SUPERCRITICAL CO; TWO-PHOTON MICROFABRICATION;

THREE DIMENSIONAL;

EID: 50149096624     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MHS.2007.4420818     Document Type: Conference Paper

References (5)

1. S. Maruo, O. Nakamura and S. Kawata, "Three-dimensional microfabrication with two-photon absorbed photo-polymerization," Optics Letters 22, no.2, 132-134 (1997).
2. S. Maruo and H. Inoue, "Optically driven micropump produced by three-dimensional two-photon microfabrication," Appl. Phys. Lett. 89, no. 14, 144101 (2006).
3. S. Maruo and Y. Hiratsuka, "All optically controlled micromanipulation systems," Proc. of Micro Total Analysis Systems 2005, 1206-1208 (2005).
4. S. Maruo and H. Inoue, "Optically driven viscous micropump using a rotating microdisk," Appl. Phys. Lett. 91, 084101 (2007).
5. Christopher N. LaFratta, Linjie Li and John T. Fourkas, "Soft-lithographic replication of 3D microstructures with closed loops," PNAS 103, no.23, 8589-8594 (2006).