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Review of Scientific Instruments

Volumn 80, Issue 8, 2009, Pages

Development and performance test of a soft x-ray polarimeter and ellipsometer for complete polarization analysis

(5) Imazono, Takashi a Sano, Kazuo b Suzuki, Yoji a Kawachi, Tetsuya a Koike, Masato a

a JAPAN ATOMIC ENERGY AGENCY (Japan)

b Shimadzu Emit Co Ltd (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM LINES; DEGREE OF LINEAR POLARIZATION; DRIVE SHAFT; ELLIPSOMETERS; ELLIPSOMETRIC MEASUREMENTS; ION BEAM SPUTTERING METHODS; MO/SI MULTILAYER; MONOCHROMATIZED LIGHTS; OPTICAL CONFIGURATIONS; PERFORMANCE TESTS; POLARIZATION ANALYSIS; SOFT X-RAY; SOFT X-RAY BEAMLINE; SOFT X-RAY REGIONS;

ELLIPSOMETRY; LIGHT TRANSMISSION; MULTILAYERS; POLARIMETERS; POLARIZATION; SPUTTERING;

X RAY APPARATUS;

EID: 69749111512 PISSN: 00346748 EISSN: None Source Type: Journal
DOI: 10.1063/1.3204458 Document Type: Article

Times cited : (20)

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