W/C, W/Ti, Ni/Ti, and Ni/V multilayers for the soft-x-ray range: Experimental investigation with synchrotron radiation

Applied Optics

Volumn 37, Issue 10, 1998, Pages 1873-1882

  Mertins, Hans Christoph ^a   Schäfers, Franz ^a   Grimmer, Hans ^b   Clemens, Daniel ^b   Böni, Peter ^b   Horisberger, Michael ^b  

^a HAHN MEITNER INSTITUT   (Germany)

^b PAUL SCHERRER INSTITUTE   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001091511     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.37.001873     Document Type: Article

References (33)

1. A. K. Ray-Chaudhuri, W. Ng, S. Liang, S. Singh, J. T. Welnak, J. P. Wallace, C. Capasso, F. Cerrina, G. Margaritondo, J. H. Underwood, J. B. Kortright, and C. C. Perrera, “First results of microscopy from a scanning photoemission microscope with a submicron probe size, ” J. Vac. Sci. Technol. A 11, 2324-2329 (1993).
2. L. Golub, M. Herant, K. Kalata, I. Lovas, G. Nystrom, F. Pardo, E. Spiller, and J. Wilczynski, “Sub-arcsecond observations of the solar x-ray corona, ” Nature (London) 344, 842-844 (1990).
3. A. M. Hawryluk and N. M. Ceglio, “Wavelength considerations in soft x-ray projection lithography, ” Appl. Opt. 32, 7062-7067 (1993).
4. N. N. Salashchenko, Y. Y. Platonov, and S. Y. Zuev, “Multilayer x-ray optics for synchrotron radiation, ” Nucl. Instrum. Methods A 359, 114-120 (1995).
5. J. B. Kortright, H. Kimura, V. Nikitin, K. Mayama, M. Yamamoto, and M. Yanaghira, “Soft x-ray (97-eV) phase retardation using transmission multilayers, ” Appl. Phys. Lett. 60, 2963-2965 (1992).
6. S. DiFonzo, R. Müller, W. Jark, A. Gaupp, F. Schafers, and J. H. Underwood, “Multilayer transmission phase shifters for the carbon K edge and the water window, ” Rev. Sci. Instrum. 66, 1513-1516 (1995).
7. C. Montcalm, P. A. Kearney, J. M. Slaughter, B. T. Sullivan, M. Chaker, H. Pepin, and C. M. Falco, “Survey of Ti-, B-, and Y-based soft-x-ray-extreme ultraviolet multilayer mirrors for the 2- to 12-nm wavelength region, ” Appl. Opt. 35, 5134-5147 (1996).
8. E. Spiller, ed., Soft X-Ray Optics, Vol. PM15 of SPIE Monographs and Handbooks Series (Society of Photo-Optical Instrumentation Engineers, Bellingham, Wash., 1994).
9. D. G. Stearns, R. S. Rosen, and S. P. Vernon, “Multilayer mirror technology for soft x-ray projection lithography, ” Appl. Opt. 31, 6952-6960 (1993).
10. 4C multilayer mirrors for soft x-ray imaging optics, ” J. X-Ray. Sci. Technol. 4, 142-150 (1994).
11. K. M. Skulina, C. S. Alford, R. M. Bionta, D. M. Makowiecki, E. M. Gullikson, R. Soufli, J. B. Kortright, and J. H. Underwood, “Molybdenum/beryllium multilayer mirrors for normal incidence in the extreme ultraviolet, ” Appl. Opt. 34, 3727-3730 (1995).
12. D. G. Stearns, R. S. Rosen, and S. P. Vernon, “Normal-incidence x-ray mirror for 7 nm, ” Opt. Lett. 16, 1283-1285 (1991).
13. A. D. Akhsakhalyan, N. N. Kolachevsky, M. M. Mitropolsky, E. N. Ragozin, N. N. Salashchenko, and V. A. Slemzin, “Fabrication and investigation of imaging normal-incidence multilayer mirrors with a narrow band reflection in the range - 4.5 nm, ” Phys. Scr. 48, 516-520 (1993).
14. I. V. Kozhevnikov, A. I. Fedorenko, V. V. Kondratenko, Y. P. Pershin, S. A. Yulin, E. N. Zubarev, H. A. Padmore, K. C. Cheung, G. E. van Dorssen, M. Roper, L. L. Balakireva, R. V. Serov, and A. V. Vinogradov, “Synthesis and measurement of normal incidence x-ray multilayer mirrors for a photon energy of 390 eV, ” Nucl. Instrum. Methods A 345, 594-602 (1994).
15. M. Yamamoto and T. Namioka, “Layer-by-layer design method for soft-x-ray multilayers, ” Appl. Opt. 31, 1622-1630 (1992).
16. A. E. Rosenbluth, “Computer search for layer materials that maximize the reflectivity of x-ray multilayers, ” Rev. Phys. Appl. 23, 1599-1621 (1988).
17. E. Spiller, Multilayer Optics for Soft X Rays, (Plenum, New York, 1986).
18. S. Di Fonzo and W. Jark, “A quarter waveplate for the polarization analysis close to the carbon K edge, ” Rev. Sci. Instrum. 63, 1375-1378 (1992).
19. H. E. Bennet and J. M. Bennet, Physics of Thin Films (Academic, New York, 1969), Vol. 4.
20. B. L. Henke, E. M. Gullikson, and J. C. Davis, “X-ray interactions: photoabsorption, scattering, transmission and reflection at E = 50-30000 eV, Z = 1-92, ” At. Data Nucl. Data Tables 54, 181-342 (1993).
21. F. Schafers and M. Krumrey, “REFLEC—a program to calculate soft x-ray optical elements and synchrotron radiation beamlines, ” Tech. Rep. BESSY TB 201 (Berliner Elektronenspeicherring-Gesellschaft für Synchrotronstrahlung, m.b.h., Berlin, 1996).
22. P. F. Miceli, D. A. Neumann, and H. Zabel, “X-ray refractive index: a tool to determine the average composition in multilayer structures, ” Appl. Phys. Lett. 48, 24-26 (1986).
23. F. Schafers, H.-Ch. Mertins, F. Schmolla, I. Packe, N. N. Salashchenko, and E. A. Shamov, “Cr/Sc multilayers for the soft x-ray range, ” Appl. Opt. 37, 719-728 (1998).
24. W. Jark and J. Stohr, “A high-vacuum triple-axis-diffractometer for soft x-ray scattering experiments, ” Nucl. Instrum. Methods A 266, 654-658 (1988).
25. Ch. Jung, ed., “Research at BESSY, ” A Users Handbook (Berliner Elektronenspeicherring-Gesellschaft fur Synchrotronstrahlung, m.b.H., Berlin, 1995).
26. F. Schafers, A. Furuzawa, K. Yamashita, M. Watanabe, and J. Underwood, “Beam splitting and polarizing properties of Cr/C multilayers close to the carbon K-edge, ” in Physics of X-Ray Multilayer Structures, Vol. 6 of 1994 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1994), p. 155.
27. F. M. F. de Groot, J. C. Fuggle, B. T. Thole, and G. A. Sa-watzky, “2p x-ray absorption of 3d transition-metal compounds: an atomic multiplet description including crystal field, ” Phys. Rev. B 42, 5459-5468 (1990).
28. H. Nagata, “Nickel/vanadium and nickel/titanium multilayers for x-ray optics, ” Jpn. J. Appl. Phys. 29, 1215-1219 (1990).
29. M. Maaza, B. Farnoux, F. Samuel, C. Sella, F. Wehling, F. Bridou, M. Groos, B. Pardo, and G. Foulet, “Reduction of the interfacial diffusion in Ni-Ti neutron-optics multilayers by carburation of the Ni-Ti interfaces, ” J. Appl. Crystallogr. 26, 574-582 (1993).
30. O. Elsenhaus, P. Boni, H. P. Friedli, H. Grimmer, P. Buffat, K. Leifer, J. Sochtig, and I. S. Anderson, “Development of Ni/Ti multilayer supermirrors for neutron optics, ” Thin Solid Films 246, 110-119 (1994).
31. T. D. Shen, M. X. Quan, J. T. Wang, and Z. Q. Hu, “Amorphous phase growth by isothermal annealing-induced interdiffusion reactions in mechanically deformed Ni/Ti multilayered composites, ” J. Mater. Sci. 29, 2981-2986 (1994).
32. 3: a new class of x-ray mirrors, ” J. Appl. Phys. 80, 3639-3645 (1996).
33. L. Landoldt-Bornstein, Numerical Data and Functional Relationships in Science and Technology, New Series, Group III, Vol. 7 (Springer, Berlin, 1982).