Dependence of dielectric charging on film thickness and deposition conditions

Proceedings of 2008 Asia Pacific Microwave Conference, APMC 2008

Volumn , Issue , 2008, Pages

  Daigler, Richard ^a   Papandreou, Eleni ^b   Tavassolian, Negar ^a   Koutsoureli, Matroni ^b   Papaioannou, George ^b   Papapolymerou, Ioannis ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b UNIVERSITY OF ATHENS   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 69649086900     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/APMC.2008.4958446     Document Type: Conference Paper

References (7)

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2. J. Wibbeler, G. Pfeifer and M. Hietschold, "Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS)", Sensors and Actuators A, vol.71, pp 74-80, 1998. (Pubitemid 128399347)
3. G. M. Rebeiz, "RF MEMS Theory, Design and Technology", Haboken, New Jersey: J. Willey and Sons, 2003.
4. G. Papaioannou, E. Papandreou, J. Papapolymerou and R. Daigler, "Dielectric Discharging processes in RF-MEMS Capacitive Switches", Asian and Pacific Microwave Conference (2007) 437-440
5. G. Papaioannou, J. Papapolymerou, P. Pons and R. Plana, "Dielectric charging in radio frequency microelectromechanical system capacitive switches: A study of material properties and device performance", Applied Physics Letters, vol.90, pp 233507, 2007
6. G. Papaioannou and J. Papapolymerou, "Dielectric charging mechanisms in RF-MEMS capacitive switches", Proceedings of the 2nd European Microwave Integrated Circuits Conference, pp 540-543, 2007
7. J. M. Shannon, S. C. Deane, B. McGarvey, and J. N. Sandoe, "Current induced drift mechanism in amorphous SiNx:H thin film diodes", Applied Physics Letters, vol.65, pp. 2978-2980, 1994