Determination of residual stresses in cathodic arc coatings by means of the parallel beam glancing X-ray diffraction technique

Thin Solid Films

Volumn 518, Issue 1, 2009, Pages 206-212

  Moreno, C M ^a   Sanchez, J M ^a   Ardila, L C ^a   Molina Aldareguia, J M ^a  

^a CEIT   (Spain)

Author keywords

Al0.66Ti0.34N coatings; Cathodic arc plasma; Elastic moduli; Hardness; Nanoindentation; Parallel beam glancing XRD technique; Residual stresses

Indexed keywords

AL0.66TI0.34N COATINGS; CATHODIC ARC; CATHODIC ARC PLASMA; DIFFRACTION PEAKS; HARD METALS; NANOINDENTATION EXPERIMENTS; PARALLEL BEAM GLANCING XRD TECHNIQUE; PARALLEL BEAMS; X-RAY DIFFRACTION TECHNIQUES;

ALUMINUM; CAVITY RESONATORS; COATINGS; DIFFRACTION; ELECTRIC ARCS; HARDNESS; NANOINDENTATION; PLASMAS; RESIDUAL STRESSES; STEEL; STRENGTH OF MATERIALS; SUBSTRATES; TITANIUM NITRIDE; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS;

ELASTIC MODULI;

EID: 69549133614     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.07.011     Document Type: Article

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