Property analysis of the rough slider bearings in micromotors for MEMS applications

IEEE/ASME Transactions on Mechatronics

Volumn 14, Issue 4, 2009, Pages 465-473

  Zhang, Wen Ming ^a   Meng, Guang ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

Microelectromechanical systems (MEMS); Micromotor; Rough; Slider bearing; Slip effect

Indexed keywords

MICROELECTROMECHANICAL SYSTEMS (MEMS); MICROMOTOR; ROUGH; SLIDER BEARING; SLIP EFFECT;

BEARINGS (STRUCTURAL); BOLTZMANN EQUATION; BUSHINGS; CAPILLARY FLOW; GAS LUBRICATED BEARINGS; GASES; KINETIC THEORY OF GASES; LUBRICATION; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; STATISTICAL MECHANICS;

COMPOSITE MICROMECHANICS;

EID: 69549116601     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMECH.2009.2023442     Document Type: Article

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