Site-selective metal patterning/metal-assisted chemical etching on GaAs substrate through colloidal crystal templating

Journal of the Electrochemical Society

Volumn 156, Issue 10, 2009, Pages

  Yasukawa, Yukiko ^a   Asoh, Hidetaka ^a   Ono, Sachiko ^a  

^a KOGAKUIN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYZATION; CHEMICAL ETCHING; COLLOIDAL CRYSTAL TEMPLATING; CONICAL STRUCTURES; ELECTROLESS; ETCHED STRUCTURES; ETCHING DEPTH; ETCHING MASKS; GAAS; GAAS SUBSTRATES; HOLE ARRAYS; HONEYCOMB PATTERN; METAL CATALYST; METAL PARTICLE; METAL-ASSISTED CHEMICAL ETCHING; POLYSTYRENE SPHERES; SELF-ASSEMBLED; SITE SELECTIVE; SLENDER COLUMNS; TRIANGULAR CROSS-SECTIONS;

CATALYSIS; CATALYSTS; FABRICATION; GALLIUM ALLOYS; HONEYCOMB STRUCTURES; METALS; PALLADIUM; POLYSTYRENES; SEMICONDUCTING GALLIUM; SILVER; SPHERES;

ANISOTROPIC ETCHING;

EID: 69549096008     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.3187239     Document Type: Article

References (20)

1. H. W. Deckman and J. H. Dunsmuir, Appl. Phys. Lett. 41, 377 (1982).
2. C. Haginoya, M. Ishibashi, and K. Koike, Appl. Phys. Lett. 71, 2934 (1997).
3. H. Asoh, A. Uehara, and S. Ono, Jpn. J. Appl. Phys., Part 1 43, 5667 (2004).
4. H. Asoh, A. Oide, and S. Ono, Electrochem. Commun. 8, 1817 (2006).
5. H. Asoh and S. Ono, Appl. Phys. Lett. 87, 103102 (2005).
6. H. Asoh, K. Nakamura, and S. Ono, Electrochim. Acta 0013-4686, 53, 83 (2007).
7. X. Li and P. W. Bohn, Appl. Phys. Lett. 0003-6951, 77, 2572 (2000).
8. S. Yae, Y. Kawamoto, H. Tanaka, N. Fukumuro, and H. Matsuda, Electrochem. Commun. 5, 632 (2003).
9. K. Tsujino and M. Matsumura, Electrochim. Acta 53, 28 (2007).
10. J. Bardwell, J. Webb, H. Tang, J. Fraser, and S. Moisa, J. Appl. Phys. 4142 (2001).
11. Y. Yasukawa, H. Asoh, and S. Ono, Electrochem. Commun. 10, 757 (2008).
12. H. Fang, R. Zeller, and P. J. Stiles, Appl. Phys. Lett. 55, 1433 (1989).
13. H. Asoh, F. Arai, K. Uchibori, and S. Ono, Appl. Phys. Express 1, 067003 (2008).
14. K. Tsujino and M. Matsumura, Adv. Mater. (Weinheim, Ger.) 17, 1045 (2005).
15. F. Arai, H. Asoh, and S. Ono, Electrochemistry (Tokyo, Jpn.) 1344-3542, 76, 187 (2008).
16. H. Asoh, F. Arai, and S. Ono, Electrochem. Commun. 9, 535 (2007).
17. I. Shiota, K. Motoya, T. Ohimi, N. Miyamoto, and J. Nishizawa, J. Electrochem. Soc. 124, 155 (1977).
18. S. Langa, J. Carstensen, M. Christophersen, H. Föll, and I. M. Tiginyanu, in Ordered Porous Nanostructures and Applications, 1st ed., R. B. Wehrspohn, Editor, p. 57, Springer, New York (2005).
19. B. Tuck and A. J. Baker, J. Mater. Sci. 0022-2461, 8, 1559 (1973).
20. M. Green, M. Garcia-Parajo, F. Khaleque, and R. Murray, Appl. Phys. Lett. 62, 264 (1993).