Site-selective chemical etching of silicon using patterned silver catalyst

Electrochemistry Communications

Volumn 9, Issue 4, 2007, Pages 535-539

  Asoh, Hidetaka ^a   Arai, Fusao ^a   Ono, Sachiko ^a  

^a KOGAKUIN UNIVERSITY   (Japan)

Author keywords

Colloidal crystals; Metal assisted chemical etching; Pattern transfer; Silicon

Indexed keywords

CATALYSTS; COLLOIDS; CRYSTAL STRUCTURE; ELECTRODEPOSITION; ELECTROLESS PLATING; ETCHING; HYDROPHOBICITY;

COLLOIDAL CRYSTALS; HYDROPHOBIC TREATMENT; METAL-ASSISTED CHEMICAL ETCHING; PATTERN TRANSFER;

SILICON;

EID: 33947728419     PISSN: 13882481     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.elecom.2006.10.041     Document Type: Article

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