Site-selective chemical etching of GaAs through a combination of self-organized spheres and silver particles as etching catalyst

Electrochemistry Communications

Volumn 10, Issue 5, 2008, Pages 757-760

  Yasukawa, Yukiko ^a   Asoh, Hidetaka ^a   Ono, Sachiko ^a  

^a KOGAKUIN UNIVERSITY   (Japan)

Author keywords

Colloidal crystals; Compound semiconductor; Electroless plating; Metal assisted chemical etching; Self organized structure

Indexed keywords

ANISOTROPIC ETCHING; COLLOIDS; ELECTROLESS PLATING; MICROFABRICATION; POLYSTYRENES;

COLLOIDAL CRYSTALS; COMPOUND SEMICONDUCTOR; METAL-ASSISTED CHEMICAL ETCHING;

SILVER;

EID: 42649087099     PISSN: 13882481     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.elecom.2008.02.024     Document Type: Article

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