Electroless deposition of noble metal nano particles as catalyst and subsequent micropatterning of silicon substrate by wet chemical etching

Electrochemistry

Volumn 76, Issue 3, 2008, Pages 187-190

  Arai, Fusao ^a   Asoh, Hidetaka ^a   Ono, Sachiko ^a  

^a KOGAKUIN UNIVERSITY   (Japan)

Author keywords

Colloidal crystal templating; Metal assisted chemical etching; Silicon

Indexed keywords

CATALYSTS; POLYSTYRENES; SILICON; WET ETCHING;

METALLIC HONEYCOMB PATTERN; MICROPATTERNING;

ELECTROLESS PLATING;

EID: 42349086414     PISSN: 13443542     EISSN: None     Source Type: Journal    
DOI: 10.5796/electrochemistry.76.187     Document Type: Article

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