Spectral interferometric technique to measure the ellipsometric phase of a thin-film structure

Optics Letters

Volumn 34, Issue 17, 2009, Pages 2661-2663

  Hlubina, Petr ^a   Ciprian, Dalibor ^a   Lunacek, Jiri ^a  

^a VSB TECHNICAL UNIVERSITY OF OSTRAVA   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; ELLIPSOMETRY; FILM THICKNESS; INTERFEROMETRY;

BIREFRINGENT CRYSTALS; INTERFEROGRAMS; PHASE CHANGE; PHASE DIFFERENCE; POLARIZED WAVE; SI SUBSTRATES; SPECTRAL INTERFEROMETRIC; THIN-FILM STRUCTURE;

THIN FILMS;

EID: 69549095809     PISSN: 01469592     EISSN: 15394794     Source Type: Journal    
DOI: 10.1364/OL.34.002661     Document Type: Article

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