Fundamentals and application of materials integration for lowpower piezoelectrically actuated ultra-nanocrystalline diamond MEMS/NEMS

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7318, Issue , 2009, Pages

  Auciello, O ^a,b   Srinivasan, S ^a   Hiller, J ^c   Sumant, A V ^b   Kabius, B ^c  

^a Materials Science Division   (United States)

^b Center for Nanoscale Materials   (United States)

^c Center for Electron Microscopy   (United States)

Author keywords

Diamond; Ferroelectric; Lead zirconate titanate; MEMS; Pb(Zr, Ti)O3; Piezoelectric; Resonators; Thin films

Indexed keywords

ELECTRICAL NOISE; FERROELECTRIC; FORCE ACTUATION; HIGH-PERFORMANCE PLATFORMS; LEAD ZIRCONATE TITANATE; LOW POWER; LOW VOLTAGES; MEMS RESONATORS; MEMS/NEMS; PB(ZR, TI)O3; PIEZOELECTRIC; PZT; SURFACE ADHESION; SURFACE CONTACT; TRIBOLOGICAL PROPERTIES; ULTRA-NANOCRYSTALLINE DIAMOND; YOUNG'S MODULUS;

DIAMONDS; ELECTRIC POTENTIAL; FERROELECTRICITY; LEAD; LEAD ALLOYS; MEMS; MICROELECTROMECHANICAL DEVICES; NANOCRYSTALLINE MATERIALS; NANOTECHNOLOGY; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; RESONATORS; SEMICONDUCTING LEAD COMPOUNDS; SENSORS; THIN FILMS; ZIRCONIUM;

DIAMOND FILMS;

EID: 69549083060     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.822798     Document Type: Conference Paper

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