Indium tin oxide thin films crystallized at a low temperature using a nanocluster deposition technique

Scripta Materialia

Volumn 61, Issue 9, 2009, Pages 867-870

  Pammi, S V N ^a   Seong, Nak Jin ^a   Yoon, Soon Gil ^a  

^a Chungnam National University   (South Korea)

Author keywords

Indium tin oxide; Low temperatures; Nanocluster deposition; Transparent conductive oxides

Indexed keywords

ELECTRICAL AND OPTICAL PROPERTIES; GRANULAR MICROSTRUCTURE; INDIUM TIN OXIDE; INDIUM TIN OXIDE FILMS; INDIUM TIN OXIDE THIN FILMS; LOW TEMPERATURES; NANOCLUSTER DEPOSITION; SUBSTRATE HEATING; TRANSPARENT CONDUCTIVE OXIDES;

DEPOSITION; ELECTRIC PROPERTIES; INDIUM; NANOCLUSTERS; OPTICAL PROPERTIES; PHOTOLITHOGRAPHY; TIN; TIN OXIDES;

OXIDE FILMS;

EID: 69449100591     PISSN: 13596462     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.scriptamat.2009.07.018     Document Type: Article

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