Bias enhanced nucleation of diamond thin films in a modified HFCVD reactor

Vacuum

Volumn 84, Issue 1, 2009, Pages 49-52

  Izak T ^a   Marton, M ^a   Varga, M ^a   Vojs, M ^a   Vesely M ^a   Redhammer, R ^a   Michalka, M ^b  

^a SLOVAK UNIVERSITY OF TECHNOLOGY   (Slovakia)

^b INTERNATIONAL LASER CENTER   (Slovakia)

Author keywords

Diamond thin films; HFCVD; Nucleation; Raman Spectroscopy; SEM

Indexed keywords

BIAS-ENHANCED NUCLEATION; CARBON PHASIS; CHEMICAL VAPOUR DEPOSITION; CLUSTER SIZES; DIAMOND LAYERS; DIAMOND THIN FILMS; HFCVD; HOT FILAMENT; SEM; SI SUBSTRATES; SI SURFACES;

BIAS VOLTAGE; CARBON CLUSTERS; DEPOSITION; DIAMONDS; NUCLEATION; RAMAN SCATTERING; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON COMPOUNDS; SYNTHETIC DIAMONDS; THIN FILMS;

DIAMOND FILMS;

EID: 69249229567     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2009.04.065     Document Type: Article

References (17)

1. Ch J.H., Wort R.S., and Balmer. Materials Today 11 1-2 (2008) 22-28
2. Vojs M., Veselý M., Redhammer R., Janík J., Kadlečíková M., Daniš T., et al. Diamond and Related Materials 14 (2005) 613-616
3. Arnault J.C., Demuynck L., Speisser C., and Le Normand F. The European Physical Journal B 11 (1999) 327-343
4. Kobayashi K., Kumagai M., Karasawa S., Watanabe T., and Togashi F. Journal of Crystal Growth 128 (1993) 408-412
5. Bienk E.J., and Eskildsen S.S. Diamond and Related Materials 2 (1993) 432-437
6. Malcher V., Mrška A., Kromka A., Šatka A., and Janík J. Current Applied Physics 2 3 (2002) 201-204
7. Shi J.R., Shi X., Sun Z., Lau S.P., Tay B.K., and Tan H.S. Diamond and Related Materials 10 (2001) 76-81
8. Prawer S., Nugent K.W., Jamieson D.N., Orwa J.O., Bursill L.A., and Peng J.L. Chemical Physical Letters 332 (2000) 93-97
9. Marton M., Ižák T., Veselý M., Vojs M., Michalka M., and Bruncko J. Vacuum 82 2 (2007) 154-157
10. Kromka A., Daniš T., Balon F., Janík J., and Vaněček M. Diamond and Related Materials 12 (2003) 356-360
11. Kromka A., Janík J., Balon F., Kubovič M., Červeň I., and Dubravcová V. Thin Solid Films 433 (2003) 73-77
12. Liao M.Y., Meng X.M., Zhou X.T., Hu J.Q., and Wang Z.G. Journal of Crystal Growth 236 (2002) 85-89
13. Sun Z., Shi J.R., Tay B.K., and Lau S.P. Diamond and Related Materials 9 (2000) 1979-1983
14. Birrell J., Gerbi J.E., Auciello O., Gibson J.M., Johnson J., and Carlisle J.A. Diamond and Related Materials 14 (2005) 86-92
15. Bühlmann S., Blank E., Haubner R., and Lux B. Diamond and Related Materials 8 (1999) 194-201
16. Wang G.Z., Ye F., Chang C., Liao Y., and Fang R.C. Diamond and Related Materials 9 (2000) 1712-1715
17. Ali N., Ahmed W., Fan Q.H., and Rego C.A. Thin Solid Films 377-378 (2000) 208-213