SCOPUS 정보 검색 플랫폼

Volumn 82, Issue 2 SPEC. ISS., 2007, Pages 154-157

Effect of argon and substrate bias on diamond thin film surface morphology

Author keywords

Diamond film; HFCVD; Nanocrystalline; NCD; Roughness

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTALLITE SIZE; FLOW RATE; NANOCRYSTALLINE MATERIALS; SUBSTRATES; SURFACE MORPHOLOGY;

DIAMOND THIN FILMS; HOT FILAMENT CHEMICAL VAPOUR DEPOSITION; NANOCRYSTALLINE DIAMOND (NCD);

DIAMOND FILMS;

EID: 35248873832 PISSN: 0042207X EISSN: None Source Type: Journal
DOI: 10.1016/j.vacuum.2007.07.008 Document Type: Article

Times cited : (11)

References (15)

1
- 7544234940
- Popov C., Kulisch W., Boycheva S., Yamamoto K., Ceccone G., and Koga Y. Diamond Relat Mater 13 (2004) 2071-2075
- (2004) Diamond Relat Mater , vol.13 , pp. 2071-2075
- Popov, C.¹ Kulisch, W.² Boycheva, S.³ Yamamoto, K.⁴ Ceccone, G.⁵ Koga, Y.⁶

2
- 0035505750
- Kang M.S., Lee W.S., and Baika Y.J. Thin Solid Films 398-399 (2001) 175-179
- (2001) Thin Solid Films , vol.398-399 , pp. 175-179
- Kang, M.S.¹ Lee, W.S.² Baika, Y.J.³

3
- 0346750573
- Seo S.H., Lee T.H., and Park J.S. Diamond Relat Mater 12 (2003) 1670-1674
- (2003) Diamond Relat Mater , vol.12 , pp. 1670-1674
- Seo, S.H.¹ Lee, T.H.² Park, J.S.³

4
- 0033377792
- Bhusan B. Diamond Relat Mater 8 (1999) 1985-2015
- (1999) Diamond Relat Mater , vol.8 , pp. 1985-2015
- Bhusan, B.¹

5
- 33751111253
- Erdemir A., Fenske G.R., Krauss A.R., Gruen D.M., McCauley T., and Csencsits R.T. Surf Coat Technol 565 (1999) 120-121
- (1999) Surf Coat Technol , vol.565 , pp. 120-121
- Erdemir, A.¹ Fenske, G.R.² Krauss, A.R.³ Gruen, D.M.⁴ McCauley, T.⁵ Csencsits, R.T.⁶

6
- 0030168807
- Choi S.K., Yung D.Y., Kweon S.Y., and Jung S.K. Thin Solid Films 279 (1996) 110-114
- (1996) Thin Solid Films , vol.279 , pp. 110-114
- Choi, S.K.¹ Yung, D.Y.² Kweon, S.Y.³ Jung, S.K.⁴

7
- 0035148198
- Jiang N., Sugimoto K., Eguchi K., Inaoka T., Shintani Y., Makita H., et al. J Cryst Growth 222 (2001) 591-594
- (2001) J Cryst Growth , vol.222 , pp. 591-594
- Jiang, N.¹ Sugimoto, K.² Eguchi, K.³ Inaoka, T.⁴ Shintani, Y.⁵ Makita, H.⁶

8
- 0035340072
- Sharda T., Umeno M., Soga T., and Jimbo T. J Appl Phys 89 (2001) 4874-4878
- (2001) J Appl Phys , vol.89 , pp. 4874-4878
- Sharda, T.¹ Umeno, M.² Soga, T.³ Jimbo, T.⁴

9
- 9644301160
- Birrell J., Gerbi J.E., Auciello O., Gibson J.M., Johnson J., and Carlisle J.A. Diamond Relat Mater 14 (2005) 86-92
- (2005) Diamond Relat Mater , vol.14 , pp. 86-92
- Birrell, J.¹ Gerbi, J.E.² Auciello, O.³ Gibson, J.M.⁴ Johnson, J.⁵ Carlisle, J.A.⁶

10
- 0036070059
- Malcher V., Mrska A., Kromka A., Satka A., and Jani{dotless}k J. Curr Appl Phys 2 (2002) 201-204
- (2002) Curr Appl Phys , vol.2 , pp. 201-204
- Malcher, V.¹ Mrska, A.² Kromka, A.³ Satka, A.⁴ Janik, J.⁵

11
- 0036016403
- Haubner R., and Lux B. Int J Refract Met Hard Met 20 (2002) 93-100
- (2002) Int J Refract Met Hard Met , vol.20 , pp. 93-100
- Haubner, R.¹ Lux, B.²

12
- 0348010223
- Park J.K., Lee W.S., Baik Y.J., and Chae K.W. Diamond Relat Mater 12 (2003) 1657-1662
- (2003) Diamond Relat Mater , vol.12 , pp. 1657-1662
- Park, J.K.¹ Lee, W.S.² Baik, Y.J.³ Chae, K.W.⁴

13
- 0001123388
- Okada K., Kanda K., Komatsu S., and Matsumoto S. J Appl Phys 88 (2001) 1674-1678
- (2001) J Appl Phys , vol.88 , pp. 1674-1678
- Okada, K.¹ Kanda, K.² Komatsu, S.³ Matsumoto, S.⁴

14
- 0001303281
- Ferrari A.C., and Robertson J. Phys Rev B63 (2001) 121405-121408
- (2001) Phys Rev , vol.B63 , pp. 121405-121408
- Ferrari, A.C.¹ Robertson, J.²

15
- 0035505750
- Kang M.S., et al. Thin Solid Films 398-399 (2001) 175-179
- (2001) Thin Solid Films , vol.398-399 , pp. 175-179
- Kang, M.S.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.