Monitoring plasma etching of biomolecules by imaging ellipsometry

Vacuum

Volumn 84, Issue 1, 2009, Pages 75-78

  Rauscher, H ^a   Stapelmann, K ^a,b   Kylian O ^a,c   Denis, B ^a,b   Rossi, F ^a  

^a JOINT RESEARCH CENTRE   (Italy)

^b RUHR UNIVERSITY BOCHUM   (Germany)

^c CHARLES UNIVERSITY   (Czech Republic)

Author keywords

Decontamination; Imaging ellipsometry; RF discharges; Sterilization

Indexed keywords

ALTERNATIVE METHODS; IMAGING ELLIPSOMETRY; LIMITING FACTORS; LOW PRESSURE PLASMA; PLASMA DISCHARGE; PLASMA TREATMENT; RF DISCHARGES; SEMI-QUANTITATIVE; STERILIZATION; TREATMENT EFFICIENCY;

BIOMOLECULES; DECONTAMINATION; ELLIPSOMETRY; GAS MIXTURES; ORGANIC POLYMERS; PLASMA APPLICATIONS; PLASMA ETCHING; PLASMAS; STERILIZATION (CLEANING);

ELECTRIC DISCHARGES;

EID: 69249215168     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2009.05.012     Document Type: Article

References (17)

1. Lerouge S., Wertheimer M.R., and Yahia L.'H. Plasma sterilization: a review of parameters, mechanisms, and limitations. Plasma Polym 6 (2001) 175-188
2. Moisan M., Barbeau J., Moreau S., Pelletier J., Tabrizian M., and Yahia L.H. Low-temperature sterilization using gas plasmas: a review of the experiments and an analysis of the inactivation mechanisms. Int J Pharm 226 (2001) 1-21
3. Laroussi M. Low temperature plasma-based sterilization: overview and state-of-the-art. Plasma Process Polym 2 (2005) 391-400
4. Rossi F., Kylián O., and Hasiwa M. Decontamination of surfaces by low pressure plasma discharges. Plasma Process Polym 3 (2006) 431-442
5. Kylian O., Hasiwa M., and Rossi F. Effect of low-pressure microwave discharges on pyrogen bioactivity. IEEE Trans Plasma Sci 34 (2006) 2606-2610
6. Hasiwa M., Kylián M., Hartung T., and Rossi F. Removal of immune-stimulatory components from surfaces by plasma discharges. Innate Immunity 14 (2008) 89-97
7. Baxter C., Campbell G.A., Whittaker A.G., Jones A.C., Aitken A., Simpson A.H., et al. Elimination of transmissible spongiform encephalopathy infectivity and decontamination of surgical instruments by using radio-frequency gas-plasma treatment. J Gen Virol 86 (2005) 2393-2399
8. Bernard C., Leduc A., Barbeau J., Saoudi B., Yahia L.H., and De Crescenzo G. Validation of cold plasma treatment for protein inactivation: a surface plasmon resonance-based biosensor study. J Phys D: Appl Phys 39 (2006) 3470-3478
9. Deng X.T., Shi J.J., and Kong M.G. Protein destruction by a helium atmospheric pressure glow discharge: capability and mechanisms. J Appl Phys 101 (2007) 074701
10. Baxter H.C., Campbell G.A., Richardson P.R., Jones A.C., Whittle I.R., Casey M., et al. Surgical instrument decontamination: efficacy of introducing an argon: oxygen RF gas-plasma cleaning step as part of the cleaning cycle for stainless steel instruments. IEEE Trans Plasma Sci 34 (2006) 1337-1344
11. Kylián O., Rauscher H., Gilliland D., Brétagnol F., and Rossi F. Removal of model proteins by means of low-pressure inductively coupled plasma discharge. J Phys D: Appl Phys 41 (2008) 095201
12. 2 ternary mixture for sterilisation and decontamination of medical instruments. J Phys D: Appl Phys 41 (2008) 192005
13. Taylor D.M. Inactivation of prions by physical and chemical means. J Hosp Infect 43 (1999) S69-S76
14. Arwin H. Ellipsometry on thin organic layers of biological interest: characterization and applications. Thin Solid Films 377-378 (2000) 48-56
15. Tompkins H.G., and Irene E.A. Handbook of ellipsometry (2005), Springer, Berlin
16. Kylián O., Rauscher H., Sirghi L., and Rossi F. Protein film removal by means of low-pressure microwave plasma - an imaging ellipsometry study. J Phys: Conf Ser 100 (2008) 062017
17. 2 ICP discharges. Plasma Process Polym 6 (2009) 255