SCOPUS 정보 검색 플랫폼

Review of Scientific Instruments

Volumn 80, Issue 7, 2009, Pages

Realization and performance evaluation of high speed autofocusing for direct laser lithography

(3) Rhee, Hyug Gyo a Kim, Dong Ik b Lee, Yun Woo a

a Korea Research Institute of Standards and Science (South Korea)

b Korea Basic Science Institute (KBSI) (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ASTIGMATIC METHOD; AUTO-FOCUSING; AUTOMATED VISION INSPECTION; CIRCULAR SYMMETRY; CYLINDRICAL LENS; DEFOCUSING; LASER INTERFEROMETER; LASER LITHOGRAPHY; LASER MICRO-MACHINING; LINEAR STAGES; LITHOGRAPHIC SYSTEMS; OPTICAL MICROSCOPES; PERFORMANCE EVALUATION;

INTERFEROMETERS; LASER INTERFEROMETRY; SPEED;

LASERS;

EID: 68949093931 PISSN: 00346748 EISSN: None Source Type: Journal
DOI: 10.1063/1.3176468 Document Type: Article

Times cited : (58)

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