Fully CMOS Compatible Capacitive Differential Pressure Sensors with On-Chip Programmabilities and Temperature Compensation

Proceedings of IEEE Sensors

Volumn 1, Issue 2, 2002, Pages 1451-1455

  Trieu, H K ^a   Kordas, N ^a   Mokwa, W ^a  

^a FRAUNHOFER INSTITUTE FOR MICROELECTRONIC CIRCUITS AND SYSTEMS   (Germany)

Author keywords

Capacitive sensor; Differential pressure sensor; On chip programmability; Temperature compensation

Indexed keywords

CAPACITANCE; CMOS INTEGRATED CIRCUITS; ELECTRIC POWER UTILIZATION; FABRICATION; IMPLANTS (SURGICAL); LINEARIZATION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROPROCESSOR CHIPS; SILICON WAFERS;

CAPACITIVE SENSORS; DIFFERENTIAL PRESSURE SENSORS; ON-CHIP PROGRAMMABILITY; TEMPERATURE COMPENSATION;

MICROSENSORS;

EID: 1542360851     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)

1. H. Dudaicevs, M. Kandler, Y.Manoli, W. Mokwa, and E. Spiegel, "Surface micromachined pressure sensors with integrated CMOS read-out electronics", Sensors and Actuators A, 43, (1994) 157-163.
2. C.C. Wang, B.P. Gogoi, D.J. Monk, and C.H. Mastrangelo, "Contamination insensitive differential capacitive pressure sensors", Proceedings MEMS 2000, pp. 551-555.