A novel tactile sensor system for heavy-load applications based on an integrated capacitive pressure sensor

Sensors and Actuators, A: Physical

Volumn 68, Issue 1-3, 1998, Pages 294-298

  Paschen, Uwe ^a   Leineweber, Michael ^a   Amelung, Jörg ^b   Schmidt, Michael ^b   Zimmer, Günter ^a,b  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

^b FRAUNHOFER INSTITUTE FOR MICROELECTRONIC CIRCUITS AND SYSTEMS   (Germany)

Author keywords

Heavy load manipulation; Microelectromechanical systems; Pressure sensors; Tactile sensors

Indexed keywords

ARRAYS; CAPACITANCE; CMOS INTEGRATED CIRCUITS; ETCHING; MICROELECTROMECHANICAL DEVICES; SUBSTRATES;

INTEGRATED CAPACITIVE PRESSURE SENSOR; TACTILE SENSOR SYSTEM;

PARTIAL PRESSURE SENSORS;

EID: 0043139056     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00021-1     Document Type: Article

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