Time-varying impedance of the sheath on a probe in an RF plasma

Plasma Sources Science and Technology

Volumn 15, Issue 4, 2006, Pages 773-782

  Chen, Francis F ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; PLASMA OSCILLATIONS; PLASMA PROBES; PLASMA THEORY;

CAPACITIVELY COUPLED DISCHARGES; DEBYE SHEATH; ELECTRON SATURATION REGION; ELECTRON TRANSIT TIMES;

ELECTRIC DISCHARGES;

EID: 33750602983     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/15/4/022     Document Type: Article

References (18)

1. Lieberman M A 1988 IEEE Trans. Plasma Sci. 16 638
2. Lieberman M A 1989 IEEE Trans. Plasma Sci. 17 338
3. Godyak V A and Sternberg N 1991 Proc. 20th Int. Conf. on Phenomena in Ionized Gases (Barga, Italy, July 8-12, 1991) p 661
4. Godyak V A and Sternberg N 1990 Phys. Rev. A 42 2299
5. Zhang Y, Liu J, Liu Y and Wang X 2004 Phys. Plasmas 11 3840
6. Sudit I D and Chen F F 1994 Plasma Sources Sci. Technol. 3 162
7. Godyak V A and Piejak R B 1990 J. Appl. Phys. 68 3157
8. Gagné R R J and Cantin A 1972 J. Appl. Phys. 43 2639
9. Cantin A and Gagné R R J 1977 Appl. Phys. Lett. 30 316
10. Godyak V A, Piejak R B and Alexandrovich B M 1992 Plasma Sources Sci. Technol. 1 36
11. Mahony C M O, Maguire P D and Graham W G 2005 Plasma Sources Sci. Technol. 14 S60
12. Chen F F 1965 Plasma Phys. 7 47
13. Allen J E, Boyd R L F and Reynolds P 1957 Proc. Phys. Soc. (Lond.) B 70 297
14. Chen F F and Arnush D 2001 Phys. Plasmas 8 5051
15. Laframboise J G 1966 University of Toronto Institute of Aerospace Studies Report No 100 National Technical Information Service Document No. AD634596
16. Mott-Smith H M and Langmuir I 1926 Phys. Rev. 28 727
17. Chen F F 1965 Electric probes Plasma Diagnostic Techniques ed R H Huddlestone and S L Leonard (New York: Academic) Chapter 4 pp 128-35
18. Langmuir I 1913 Phys. Rev. 2 450