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Volumn 48, Issue 6, 2009, Pages

Observation of the creation and annihilation of local current paths in HfO2 thin films on pt by ultrahigh-vacuum conductive atomic force microscopy: Evidence of oxygen spill over during the forming process

(4) Sasaki, Naotaka a Kita, Koji a Toriumi, Akira a Kyuno, Kentaro b

a UNIVERSITY OF TOKYO (Japan)

b SHIBAURA INSTITUTE OF TECHNOLOGY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTIVE ATOMIC FORCE MICROSCOPY; CREATION AND ANNIHILATION; CURRENT PATHS; DIRECT OBSERVATION; EXPERIMENTAL EVIDENCE; FORMING PROCESS; OXYGEN-ION DIFFUSION; SPILL OVER;

ATOMIC FORCE MICROSCOPY; ATOMS; ELECTRIC FIELDS; HAFNIUM COMPOUNDS; OXYGEN; PLATINUM; THIN FILMS; VACUUM;

CONDUCTIVE FILMS;

EID: 68649119377 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.48.060202 Document Type: Article

Times cited : (9)

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