YBCO nanobridges: Simplified fabrication process by using a Ti hard mask

IEEE Transactions on Applied Superconductivity

Volumn 19, Issue 3, 2009, Pages 183-186

  Papari, G ^a   Carillo, Franco ^b   Born, Detlef ^b   Bartoloni, L ^b   Gambale, E ^c,d   Stornaiuolo, D ^a   Pingue, P ^b   Beltram, F ^b   Tafuri, Francesco ^c,d  

^a UNIVERSITY OF NAPLES FEDERICO II   (Italy)

^b INFM   (Italy)

^c SECOND UNIVERSITY OF NAPLES   (Italy)

^d Coherentia INFM CNR ^*

Author keywords

High temperature superconductors; Nanotechnology; Superconducting device fabrication; Superconducting device measurements

Indexed keywords

C-AXIS ORIENTED FILM; CRITICAL TEMPERATURES; FABRICATION PROCEDURE; FABRICATION PROCESS; HARD MASKS; HIGH QUALITY; MICRO-BRIDGE; NANO SCALE; NANO-BRIDGES; PATTERNING PROCESS; REPRODUCIBILITIES; SUPERCONDUCTING DEVICE FABRICATION; TRANSPORT MEASUREMENTS;

FABRICATION; FIELD EFFECT TRANSISTORS; HIGH TEMPERATURE SUPERCONDUCTORS; NANOTECHNOLOGY; SUPERCONDUCTING CABLES; TITANIUM; YTTRIUM BARIUM COPPER OXIDES;

SUPERCONDUCTIVITY;

EID: 68649101745     PISSN: 10518223     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASC.2009.2019023     Document Type: Conference Paper

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