Ultraviolet light assisted oxygenation process for submicron YBa 2Cu3O7-δ thin film devices

Journal of Applied Physics

Volumn 91, Issue 8, 2002, Pages 5411-5418

  Herbstritt, F ^a   Kemen, T ^a   Marx, A ^a   Gross, R ^a  

^a WALTHER MEISSNER INSTITUT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAM RESIST; GRAIN BOUNDARY JUNCTIONS; ION BEAM ETCHING; JUNCTION AREA; NANO-BRIDGES; OXYGEN LOSS; PATTERNING PROCESS; POST-TREATMENT PROCEDURES; RESIST DEVELOPMENT; SAMPLE QUALITY; STRUCTURAL DAMAGES; SUBMICRON; ULTRA-VIOLET LIGHT;

ELECTRON BEAMS; OXYGENATION; SEMICONDUCTOR JUNCTIONS; SUPERCONDUCTIVITY; THIN FILM DEVICES; TRANSPORT PROPERTIES; ULTRAVIOLET RADIATION;

OXYGENATORS;

EID: 0037091467     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1459599     Document Type: Article

References (45)

1. S. Tahara, S. M. Anlage, J. Halbritter, C.-B. Eom, D. K. Fork, T. H. Geballe, and M. R. Beasley, Phys. Rev. B 41, 11203 (1990). prb PRBMDO 0163-1829
2. H. Jiang et al., Phys. Rev. Lett. 66, 1785 (1991). prl PRLTAO 0031-9007
3. R. Hahn, G. Fotheringham, and J. Klockau, IEEE Trans. Appl. Supercond. 5, 1440 (1995). tas ITASE9 1051-8223
4. K. K. Likharev, Sov. Phys. JETP 34, 906 (1970). spj SPHJAR 0038-5646
5. J. R. Wendt et al., Appl. Phys. Lett. 62, 1597 (1992). apl APPLAB 0003-6951
6. J. Schneider, H. Kohlstedt, and R. Wördenweber, Appl. Phys. Lett. 63, 2426 (1993). apl APPLAB 0003-6951
7. M. V. Pedyash, G. J. Gerritsma, D. H. A. Blank, and H. Rogalla, IEEE Trans. Appl. Supercond. 5, 1387 (1996). tas ITASE9 1051-8223
8. R. Ijsselsteijn, H. Elsner, W. Morgenroth, V. Schultze, and H.-G. Meyer, IEEE Trans. Appl. Supercond. 9, 3933 (1999). tas ITASE9 1051-8223
9. H. Elsner, R. Ijsselsteijn, W. Morgenroth, H. Roth, and H.-G. Meyer, Inst. Phys. Conf. Ser. 158, 253 (1997). ipc IPHSAC 0305-2346
10. L. Alff, S. Kleefisch, U. Schoop, M. Zittartz, T. Kemen, T. Bauch, A. Marx, and R. Gross, Eur. Phys. J. B 5, 423 (1998). epb EPJBFY 1434-6028
11. M. Kawasaki, P. Chaudhari, and A. Gupta, Phys. Rev. Lett. 68, 1065 (1992). prl PRLTAO 0031-9007
12. T. Kemen, A. Marx, L. Alff, D. Koelle, and R. Gross, IEEE Trans. Appl. Supercond. 9, 3982 (1999). tas ITASE9 1051-8223
13. A. Marx, L. Alff, and R. Gross, Appl. Supercond. 6, 621 (1999). als ASUEE6 0964-1807
14. A. Marx and R. Gross, Appl. Phys. Lett. 70, 120 (1997). apl APPLAB 0003-6951
15. A. Marx, L. Alff, and R. Gross, IEEE Trans. Appl. Supercond. 7, 2719 (1997). tas ITASE9 1051-8223
16. A. Marx, U. Fath, L. Alff, and R. Gross, Appl. Phys. Lett. 67, 1929 (1995). apl APPLAB 0003-6951
17. A. Marx, U. Fath, W. Ludwig, R. Gross, and T. Amrein, Phys. Rev. B 51, 6735 (1995). prb PRBMDO 0163-1829
18. L. Hao, J. C. Macfarlane, and C. M. Pergrum, Supercond. Sci. Technol. 9, 678 (1996). sux SUSTEF 0953-2048
19. K. S. Ralls and R. A. Buhrman, Phys. Rev. B 44, 5800 (1991). prb PRBMDO 0163-1829
20. C. T. Rogers and R. A. Buhrman, Phys. Rev. Lett. 55, 859 (1985). prl PRLTAO 0031-9007
21. F. Herbstritt, T. Kemen, L. Alff, A. Marx, and R. Gross, Appl. Phys. Lett. 78, 955 (2001). apl APPLAB 0003-6951
22. F.-M. Kamm, A. Plettl, and P. Ziemann, Supercond. Sci. Technol. 11, 1397 (1998). sux SUSTEF 0953-2048
23. P. Larsson, B. Nilsson, and Z. G. Ivanov, J. Vac. Sci. Technol. B 18, 25 (2000). jvb JVTBD9 0734-211X
24. R. Barth, B. Spangenberg, C. Jaekel, H. G. Roskos, H. Kurz, and B. Holzapfel, Appl. Phys. Lett. 63, 1149 (1993). apl APPLAB 0003-6951
25. L. G. Parratt, Phys. Rev. 95, 359 (1954). phr PHRVAO 0031-899X
26. H. Hochmut and M. Lorenz, Physica C 220, 209 (1994). phc PHYCE6 0921-4534
27. H. Y. Zhai and W. K. Chu, Appl. Phys. Lett. 76, 3469 (2000). apl APPLAB 0003-6951
28. U. Schoop, M. Schonecke, S. Schymon, T. Bauch, A. Marx, B. Widenhorst, L. Alff, and R. Gross, Supercond. Sci. Technol. 12, 1016 (1999). sux SUSTEF 0953-2048
29. M. P. Siegal, J. M. Phillips, R. B. van Dover, T. H. Tiefel, and J. H. Marshall, J. Appl. Phys. 68, 6353 (1990). jap JAPIAU 0021-8979
30. C Superconducting Systems (Springer, Berlin, 1994), p. 116.
31. W. J. Lin, P. D. Hatton, F. Baudenbacher, and J. Santiso, Appl. Phys. Lett. 72, 2966 (1998). apl APPLAB 0003-6951
32. J. G. Thompson, B. G. Hyde, R. L. Withers, J. S. Anderson, J. D. F. Gerald, J. Bitmead, M. S. Paterson, and A. M. Stewart, Mater. Res. Bull. 22, 1715 (1987). mrb MRBUAC 0025-5408
33. R. L. Kurtz, R. Stockbauer, T. E. Madey, D. Mueller, A. Shih, and L. Toth, Phys. Rev. B 36, 7976 (1988). prb PRBMDO 0163-1829
34. H. Behner, K. Rührnschopf, G. Wedler, and W. Rauch, Physica C 208, 419 (1993). phc PHYCE6 0921-4534
35. V. Pendrick, R. Brown, J. R. Matey, A. Findikoglu, X. X. Xi, T. Venkatesan, and A. Inam, J. Appl. Phys. 69, 7927 (1991). jap JAPIAU 0021-8979
36. S. J. Rothman, J. L. Routbort, U. Welp, and J. E. Baker, Phys. Rev. B 44, 2326 (1991). prb PRBMDO 0163-1829
37. C. P. Foley, R. Driver, S. K. Lam, Y. Wilson, B. Sankrithyan, and E. E. Mitchell, Inst. Phys. Conf. Ser. 158, 507 (1997). ipc IPHSAC 0305-2346
38. S. Kittelberger, U. Bolz, R. P. Huebener, B. Holzapfel, L. Mex, and R. A. Schwarzer, Physica C 312, 7 (1999). phc PHYCE6 0921-4534
39. S.-W. Chan, L. H. Greene, W. L. Feldmann, P. F. Miceli, and B. G. Bagley, AIP Conf. Proc. 165, 28 (1988). apc APCPCS 0094-243X
40. S. A. Degterov and G. F. Voronin, Physica C 208, 403 (1993). phc PHYCE6 0921-4534
41. B. W. Veal, H. You, A. P. Paulikas, H. Shi, Y. Fang, and J. W. Downey, Phys. Rev. B 42, 4770 (1990). prb PRBMDO 0163-1829
42. A. F. Hollemann and E. Wiberg, Lehrbuch der Anorganischen Chemie, 81th-90th ed. (de Gruyter, Berlin, 1976).
43. O. Müller, J. Schubert, W. Zander, and B. Stritzker, Physica C 191, 103 (1992). phc PHYCE6 0921-4534
44. J. Du, K. E. Leslie, C. P. Foley, G. L. Harding, B. Sankrithyan, and D. L. Tilbrook, Supercond. Sci. Technol. 12, 1027 (1999). sux SUSTEF 0953-2048
45. P. Rottländer, H. Kohlstedt, H. A. M. de Gronckel, E. Girgis, J. Schelten, and P. Grünberg, J. Magn. Magn. Mater. 210, 251 (2000). jmm JMMMDC 0304-8853