Characterization of minority species in reactive plasmas by cryotrap-assisted mass spectrometry

Plasma Sources Science and Technology

Volumn 18, Issue 3, 2009, Pages

  Ferreira, J A ^a   Tabares F L ^a  

^a LABORATORIO NACIONAL DE FUSIÓN   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

DC GLOW DISCHARGE; FUSION PLASMAS; GASEOUS MIXTURE; RADICAL FORMATION; REACTIVE INTERMEDIATE; REACTIVE PLASMAS; REACTOR SYSTEMS; REACTOR WALLS; UNDERLYING MECHANISM;

CARBON FILMS; CHEMICAL VAPOR DEPOSITION; GLOW DISCHARGES; LIQUID NITROGEN; MASS SPECTROMETERS; MASS SPECTROMETRY; PLASMA DEPOSITION; PLASMA DIAGNOSTICS; TRITIUM;

PLASMAS;

EID: 68649094252     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/18/3/034019     Document Type: Article

References (10)

1. Grill A 1999 Diamond Relat. Mater. 8 428
2. Auciello O and Flamm D (ed) 1989 Plasma Diagnostics (New York: Academic)
3. Ferreira J A and Tabarés F L 2007 J. Vac. Sci. Technol. A 25 246-51
4. Tabarés F L, Ferreira J A and Tafalla D 2007 Chem. Vapor Depos. 13 335
5. Tabarés F L and Rohde V 2004 Plasma Phys. Control. Fusion 46 B381-95
6. Tabares F L, Tafalla D, Tanarro I, Herrero V J, Islyaikin A and Maffiotte C 2002 Plasma Phys. Control. Fusion 44 L37
7. Jauberteau J L, Jauberteau I and Aubreton J 2002 J. Phys. D: Appl. Phys. 35 665
8. Hopf C, Letourneur K, Jacob W, Schwarz-Selinger T and von Keudell A 1999 Appl. Phys. Lett. 74 3800
9. Legrand J, Diamy A, Hrach R and Hrachova V 1997 Contrib. Plasma Phys. 37 521
10. Lau K, Li W, Ng C and Chiu S 1999 J. Phys. Chem. A 103 3330