Thermal characterization of Si3N4 thin films using transient thermoreflectance technique

IEEE Transactions on Industrial Electronics

Volumn 56, Issue 8, 2009, Pages 3238-3243

  Bai, Suyuan ^a,b   Tang, Zhenan ^a   Huang, Zhengxing ^a   Yu, Jun ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

^b LIAONING NORMAL UNIVERSITY   (China)

Author keywords

Genetic algorithms (GAs); Interfacial thermal resistance (ITR); Thermal conductivity (TC); Transient thermoreflectance technique

Indexed keywords

INTERFACIAL THERMAL RESISTANCE; INTERFACIAL THERMAL RESISTANCE (ITR); LOWER PRESSURES; METAL LAYER; ROOM TEMPERATURE; THERMAL CHARACTERIZATION; THREE-LAYER MODELS; TRANSIENT THERMOREFLECTANCE TECHNIQUE; TRANSIENT THERMOREFLECTANCE TECHNIQUES; TRANSMISSION-LINE THEORY;

CARBON FIBER REINFORCED PLASTICS; DEPOSITION; GENETIC ALGORITHMS; THERMAL CONDUCTIVITY; THERMOANALYSIS; THERMODYNAMIC PROPERTIES; THIN FILMS; UNCERTAINTY ANALYSIS;

THERMAL CONDUCTIVITY OF GASES;

EID: 68449099925     PISSN: 02780046     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIE.2009.2022078     Document Type: Article

References (15)

1. X. Zhang and C. P. Grigoropoulos, "Thermal conductivity and diffusivity of free standing silicon nitride thin films," Rev. Sci. Instrum., vol. 66, no. 2, pp. 1115-1120, Feb. 1995.
2. S. M. Lee and D. G. Cahill, "Heat transport in thin dielectric films," J. Appl. Phys., vol. 81, no. 6, pp. 2590-2595, Mar. 1997.
3. A. Irace and P. M. Sarro, "Measurement of thermal conductivity and diffusivity of single and multilayer membranes," Sens. Actuators A, Phys., vol. 76, no. 1-3, pp. 323-328, Aug. 1999.
4. Q. L. Song, S. H. Xia, S. F. Chen, and Z. Cui, "A new structure for measuring the thermal conductivity of thin film," in Proc. Int. Conf. Inf. Acquisition, 2004, pp. 77-79.
5. O. W. Kading, H. Skurk, and K. E. Goodson, "Thermal conduction in metalized silicon-dioxide layers on silicon," Appl. Phys. Lett., vol. 65, no. 13, pp. 1629-1631, Sep. 1994.
6. K. Ujihara, "Reflectivity of metals at high temperatures," J. Appl. Phys., vol. 43, no. 5, pp. 2376-2383, May 1972.
7. G. Chen and P. Hui, "Pulsed photothermal modeling of composite samples based on transmission-line theory of heat conduction," Thin Solid Films, vol. 339, no. 1/2, pp. 58-67, Feb. 1999.
8. Y. M. Zhao and G. Chen, "Thermal characterization of gallium arsenic nitride epilayer on gallium arsenide substrate using pulsed photothermal reflectance technique," Thin Solid Films, vol. 450, no. 2, pp. 352-356, Mar. 2004.
9. D. J. Yang, Q. Zhang, G. Chen, S. F. Yoon, J. Ahn, S. G. Wang, Q. Zhou, Q. Wang, and J. Q. Li, "Thermal conductivity of multiwalled carbon nanotubes," Phys. Rev. B, Condens. Matter, vol. 66, no. 16, p. 165 440, Oct. 2002.
10. H. Stehfest, "Algorithm 368 numerical inversion of Laplace transforms," Commun. ACM, vol. 13, no. 1, pp. 47-49, Jan. 1970.
11. H. Stehfest, "Remark on algorithm 368 numerical inversion of Laplace transforms," Commun. ACM, vol. 13, no. 10, p. 624, Oct. 1970.
12. K. F. Man, K. S. Tang, and S. Kwong, "Genetic algorithms: Concepts and applications," IEEE Trans. Ind. Electron., vol. 43, no. 5, pp. 519-534, Oct. 1996.
13. K. S. Low and T. S. Wong, "A multiobjective genetic algorithm for optimizing the performance of hard disk drive motion control system," IEEE Trans. Ind. Electron., vol. 54, no. 3, pp. 1716-1725, Jun. 2007.
14. X. P. Wang and L. M. Cao, The Genetic Algorithm - Theory, Application and Software Implement. Xi'an, China: Xi'an Jiaotong Univ. Press, 2002.
15. 2 thin film," Rev. Sci. Instrum., vol. 79, no. 5, p. 054 902, May 2008.