A new structure for measuring the thermal conductivity of thin film

Proceedings of the 2004 International Conference on Information Acquisition, ICIA 2004

Volumn , Issue , 2004, Pages 77-79

  Song, Qinglin ^a   Xia, Shanhong ^a   Chen, Shaofeng ^a   Cui, Zheng ^b  

^a INSTITUTE OF ELECTRONICS   (China)

^b RUTHERFORD APPLETON LABORATORY   (United Kingdom)

Author keywords

Bridge structure; Thermal conductivity; Thin film

Indexed keywords

COMPUTER SIMULATION; HEAT FLUX; MICROMACHINING; SILICON NITRIDE; THERMAL CONDUCTIVITY; THERMOMETERS;

BRIDGE STRUCTURE; HOLOGRAPHIC INTERFEROMETRY METHOD; SCANNING THERMAL MICROSCOPE (STHM); THERMO-RESISTORS;

THIN FILMS;

EID: 21444451728     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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