A suspended plate viscosity sensor featuring in-plane vibration and piezoresistive readout

Journal of Micromechanics and Microengineering

Volumn 19, Issue 7, 2009, Pages

  Riesch, C ^a   Reichel, E K ^b   Jachimowicz, A ^a   Schalko, J ^a   Hudek, P ^c   Jakoby, B ^b   Keplinger, F ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^b JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

^c VORARLBERG UNIVERSITY OF APPLIED SCIENCES   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

DEVICE DESIGNERS; FABRICATION PROCESS; IN-PLANE; IN-PLANE VIBRATION; LABORATORY EQUIPMENTS; MEASUREMENT RESULTS; MICROMACHINED; MOVING PLATE; OPERATING FREQUENCY; PIEZORESISTIVE READ-OUT; QUALITY FACTORS; RECTANGULAR PLATES; RESONANCE FREQUENCIES; VIBRATION AMPLITUDE; VISCOSITY PARAMETERS; VISCOSITY SENSOR;

DAMPING; LORENTZ FORCE; MAGNETIC FIELD EFFECTS; RESONANCE; SENSORS;

VISCOSITY;

EID: 68249140387     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/7/075010     Document Type: Article

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