A novel sensor system for liquid properties based on a micromachined beam and a low-cost optical readout

Proceedings of IEEE Sensors

Volumn , Issue , 2007, Pages 872-875

  Riesen, Christian ^a   Jachimowicz, Artur ^a   Keplinger, Franz ^a   Reichel, Erwin K ^b   Jakoby, Bernhard ^b  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^b JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

CHLORINE COMPOUNDS; DAMPING; HYDRODYNAMICS; INTERCONNECTION NETWORKS; LIQUIDS; NATURAL FREQUENCIES; OXIDE MINERALS; QUARTZ; RESONANCE; VISCOMETERS; VISCOSITY;

BEAM DEFLECTION; COMPLEX LIQUIDS; CONVENTIONAL MEASUREMENTS; DAMPING FACTORS; DVD DRIVES; HIGH SENSITIVITIES; LIQUID PROPERTIES; MICROACOUSTIC SENSORS; MICROMACHINED; MICROMACHINED STRUCTURES; OPTICAL READOUTS; PICK-UP HEAD; QUARTZ RESONATORS; RESONANCE FREQUENCIES; SENSOR SYSTEMS; SIMULTANEOUS DETERMINATIONS;

SENSORS;

EID: 42149134273     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2007.4388540     Document Type: Conference Paper

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