MEMS sensors for density-viscosity sensing in a low-flow microfluidic environment

Sensors and Actuators, A: Physical

Volumn 141, Issue 2, 2008, Pages 266-275

  Etchart, Isabelle ^a   Chen, Hua ^a   Dryden, Philip ^a   Jundt, Jacques ^a   Harrison, Christopher ^a   Hsu, Kai ^b   Marty, Frederic ^c   Mercier, Bruno ^c  

^a SCHLUMBERGER DOLL RESEARCH   (United States)

^b SCHLUMBERGER   (United States)

^c Ecole Superieure d'Ingenieurs en   (France)

Author keywords

Cantilever; Density; MEMS; Microfluidics; Resonance; Silicon; Viscosity

Indexed keywords

MEMS; MICROCHANNELS; MICROFLUIDICS; NATURAL FREQUENCIES; OIL FIELD DEVELOPMENT; SILICON; VISCOSITY;

CANTILEVERS; FLUID PROPERTIES; MICROFLUIDIC CHANNELS;

MICROSENSORS;

EID: 38149108974     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.08.007     Document Type: Article

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