Propagation characteristics of shear horizontal surface acoustic waves in (112̄0) ZnO film/silica glass substrate structures

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 55, Issue 12, 2008, Pages 2709-2713

  Tanaka, Atsushi ^a   Yanagitani, Takahiko ^b   Matsukawa, Mami ^a   Watanabe, Yoshiaki ^a  

^a DOSHISHA UNIVERSITY   (Japan)

^b NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRICAL PROPERTY; ELECTROMECHANICAL COUPLING COEFFICIENTS; GLASS SUBSTRATES; LONGITUDINAL DISPLACEMENTS; PROPAGATION CHARACTERISTICS; RF-MAGNETRON SPUTTERING; SH-SAW SENSORS; SHEAR HORIZONTAL SURFACE ACOUSTIC WAVE; SHEAR HORIZONTALS; THEORETICAL RESULT; ZNO; ZNO FILMS;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVE PROPAGATION; ACOUSTIC WAVES; ACOUSTICS; ACOUSTOELECTRIC EFFECTS; ELECTRIC PROPERTIES; ELECTROMECHANICAL DEVICES; GLASS; MAGNETRON SPUTTERING; SHEAR FLOW; ULTRASONIC TRANSDUCERS; ZINC OXIDE;

SUBSTRATES;

GLASS; SILICON DIOXIDE; ZINC OXIDE;

ACOUSTICS; CHEMISTRY; ELECTROCHEMISTRY; ELECTROMAGNETIC FIELD; INSTRUMENTATION; LETTER; METHODOLOGY; THEORETICAL MODEL; TRANSDUCER; X RAY DIFFRACTION;

ACOUSTICS; ELECTROCHEMISTRY; ELECTROMAGNETIC PHENOMENA; GLASS; MODELS, THEORETICAL; SILICON DIOXIDE; TRANSDUCERS; X-RAY DIFFRACTION; ZINC OXIDE;

EID: 68149176905     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2008.986     Document Type: Article

References (18)

1. T. Moriizumi, Y. Unno, and S. Shiokawa, "New sensor in liquid using leaky SAW", in Proc. IEEE Ultrason. Symp., nov. 1987, pp. 579-582.
2. J. Kondoh and S. Shiokawa, "Shear surface acoustic wave liquid sensor based on acoustoelectric interaction", Electron. Commun. Jpn., vol. 78, no. 1, pp. 101-112, 1995.
3. J. Kondoh and S. Shiokawa, "Shear-horizontal surface acoustic wave sensors", Sens. Update, vol. 6, no. 1, pp. 59-78, 1999.
4. 3", Jpn. J. Appl. Phys., vol. 26 (suppl. 26-1), pp. 159-161, 1987.
5. E. Gizeli, A. C. Stevenson, N. J. Goddard, and C. R. Lowe, "A novel Love-plate acoustic sensor utilizing polymer overlayers", IEEE Trans. Ultrason. Ferroelectr. Freq. Control, vol. 39, no. 5, pp. 657-659, Sep. 1992.
6. G. Kovacs, M. J. Vellekoop, R. Haueis, G. W. Lubking, and A. Venema, "A Love wave sensor for (bio) chemical sensing in liquids", Sens. and Actuators A, vol. 43, no. 1-3, pp. 38-43, May 1994.
7. 2 structures", IEEE Trans. Ultrason. Ferroelectr. Freq. Control, vol. 48, no. 1, pp. 268-273, Jan. 2001.
8. K. K. Zadeh, A. Trinchi, W. Wlodarski, and A. Holland, "A novel Love-mode device based on a ZnO/ST-cut quartz crystal structure for sensing applications", Sens. and Actuators A, vol. 100, no. 2-3, pp. 135-143, Sep. 2002.
9. S. Y. Chu, W. Water, and J. T. Liaw, "An investigation of the dependence of ZnO film on the sensitivity of Love mode sensor in ZnO/quartz structure", Ultrason., vol. 41, no. 2, pp. 133-139, Mar. 2003.
10. 3 substrates and their applications as liquid sensors", J. Vac. Sci. Technol. A, vol. 22, no. 6, pp. 2424-2430, Nov.-Dec. 2004.
11. T. Yanagitani, M. Matsukawa, Y. Watanabe, and T. Otani, "Formation of uniaxially (11 2̄ 0) textured ZnO film on glass substrates", J. Cryst. Growth, vol. 276, pp. 424-430, Apr. 2005.
12. T. Yanagitani, M. Kiuchi, M. Matsukawa, and Y. Watanabe, "Characteristics of pure-shear mode BAW resonators consisting of (11 2̄ 0) textured ZnO films", IEEE Trans. Ultrason. Ferroelectr. Freq. Control, vol. 54, no. 8, pp. 1680-1686, Aug. 2007.
13. 3", in Proc. IEEE Ultrason. Symp., 1987, pp. 215-219.
14. 3 transducers", Sens. and Actuators A, vol. 115, no. 2-3, pp. 456-461, Sep. 2004.
15. G. W. Farnell and E. L. Adler, "Elastic wave propagation in thin layers", in Physical Acoustics, vol. 4, W. P. Mason, Ed. New York: Academic Press, 1972, pp. 35-127.
16. T. Kawamoto, T. Yanagitani, M. Matsukawa, and Y. Watanabe, "Effects of sputtering gas conditions on the formation of (11 2̄ 0) textured ZnO films", Jpn. J. Appl. Phys., vol. 46, no. 7 b, 2007.
17. 15 and crystallites alignment of (11 2̄ 0) textured ZnO films", J. Appl. Phys., vol. 102, no. 2, 2007.
18. R. T. Smith and V. E. Stubblefield, "Temperature dependence of the electroacoustical constants of Li-doped ZnO single crystals", J. Acoust. Soc. Am., vol. 46, no. 1 A, p. 105, 1969.