The heuristic dispatching method of automatic material handling system in 300mm semiconductor fabrication

International Journal of Innovative Computing, Information and Control

Volumn 5, Issue 7, 2009, Pages 1927-1935

  Wang, Chia Nan ^a  

^a NATIONAL KAOHSIUNG UNIVERSITY OF APPLIED SCIENCES   (Taiwan)

Author keywords

AMHS; OHT; Semiconductor manufacturing

Indexed keywords

300 MM SEMICONDUCTOR MANUFACTURING; 300 MM WAFERS; AMHS; AUTOMATED MATERIALS HANDLING; AUTOMATED PRODUCTIONS; AUTOMATIC MATERIAL HANDLING SYSTEMS; LOADING AND UNLOADING; LOTS DELIVERY; MATERIAL HANDLING; NUMERICAL EXPERIMENTS; OHT; OHT DISPATCHING; OVERHEAD HOIST TRANSPORTS; PRODUCT CYCLE TIME; SEMI-CONDUCTOR FABRICATION; SEMICONDUCTOR MANUFACTURING; SHOP FLOOR CONTROL; TRAFFIC JAMS; TRANSPORT DELAY; WAITING TIME;

MANUFACTURE; MATERIALS HANDLING EQUIPMENT; PLANT LAYOUT; SEMICONDUCTOR DEVICE MANUFACTURE; TRAFFIC CONGESTION; UNLOADING;

HEURISTIC METHODS;

EID: 67749084219     PISSN: 13494198     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

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