Substantial Doppler broadening of atomic-hydrogen lines in dc and capacitively coupled RF plasmas

Journal of Physics D: Applied Physics

Volumn 42, Issue 13, 2009, Pages

  Akhtar, Kamran ^a   Scharer, John E ^b   Mills, Randell L ^a  

^a BlackLight Power Incorporated   (United States)

^b University of Wisconsin Madison   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC MASS; BALMER EMISSIONS; BALMER LINES; CAPACITIVELY COUPLED; CAPACITIVELY COUPLED RF DISCHARGE; DC GLOW DISCHARGE; DOPPLER BROADENING; FIELD ACCELERATION; GAS COMPOSITIONS; GAUSSIANS; HELIUM ATOM; HIGH RESOLUTION; HYDROGEN ATOMS; HYDROGEN LINES; LANGMUIR PROBE MEASUREMENTS; NOBLE GAS; PARALLEL PLATES; RF CAPACITIVE DISCHARGES; RF PLASMA; SHEATH REGIONS;

EMISSION SPECTROSCOPY; GLOW DISCHARGES; HELIUM; HYDROGEN; INERT GASES; OPTICAL EMISSION SPECTROSCOPY; PLASMA DENSITY; PLASMAS; TUNGSTEN; WIRELESS TELECOMMUNICATION SYSTEMS;

ATOMS;

EID: 67650752935     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/42/13/135207     Document Type: Article

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