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Comparison between Figs. reveals that the discrepancies between experimental and simulated results are relatively larger for the TM-polarized light than for the TE polarization. We attribute this to the small laser spot size 4 and 5 μm employed in our experiments, which was necessary to make the probed area smaller than the grating length; the finite spot size was however not taken into account in the RCWA simulations. Though not included in this paper, we have confirmed using independent FDTD simulations that the TM-polarized case indeed reacts more sensitively to the change in grating size.
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Comparison between Figs. reveals that the discrepancies between experimental and simulated results are relatively larger for the TM-polarized light than for the TE polarization. We attribute this to the small laser spot size 4 and 5 μm employed in our experiments, which was necessary to make the probed area smaller than the grating length; the finite spot size was however not taken into account in the RCWA simulations. Though not included in this paper, we have confirmed using independent FDTD simulations that the TM-polarized case indeed reacts more sensitively to the change in grating size.
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