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Volumn 95, Issue 2, 2009, Pages

AlGaN membrane grating reflector

Author keywords

[No Author keywords available]

Indexed keywords

AIR-BRIDGE; ALGAN; BLOCH BAND; FILLING FACTOR; GRATING REFLECTORS; HOLOGRAPHIC LITHOGRAPHY; PHOTO-ELECTROCHEMICAL ETCHING; SHORT-WAVELENGTH; SIMULATION RESULT; SPECTRAL RANGE; TRANSVERSE-ELECTRIC POLARIZATIONS;

EID: 67650739692     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3168552     Document Type: Article
Times cited : (30)

References (18)
  • 8
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    • See, for recent example, 1094-4087,. 10.1364/OE.16.018249
    • See, for recent example, M. Shokooh-Saremi and R. Magnusson, Opt. Express 1094-4087 16, 18249 (2008). 10.1364/OE.16.018249
    • (2008) Opt. Express , vol.16 , pp. 18249
    • Shokooh-Saremi, M.1    Magnusson, R.2
  • 9
    • 0035938332 scopus 로고    scopus 로고
    • 0003-6951,. 10.1063/1.1367898
    • Z. -Y. Li, Y. Yin, and Y. Xia, Appl. Phys. Lett. 0003-6951 78, 2431 (2001). 10.1063/1.1367898
    • (2001) Appl. Phys. Lett. , vol.78 , pp. 2431
    • Li, Z.-Y.1    Yin, Y.2    Xia, Y.3
  • 11
    • 0020824090 scopus 로고
    • 0030-3941,. 10.1364/JOSA.73.001105
    • M. G. Moharam and T. K. Gaylord, J. Opt. Soc. Am. 0030-3941 73, 1105 (1983). 10.1364/JOSA.73.001105
    • (1983) J. Opt. Soc. Am. , vol.73 , pp. 1105
    • Moharam, M.G.1    Gaylord, T.K.2
  • 16
    • 67650781292 scopus 로고    scopus 로고
    • Comparison between Figs. reveals that the discrepancies between experimental and simulated results are relatively larger for the TM-polarized light than for the TE polarization. We attribute this to the small laser spot size 4 and 5 μm employed in our experiments, which was necessary to make the probed area smaller than the grating length; the finite spot size was however not taken into account in the RCWA simulations. Though not included in this paper, we have confirmed using independent FDTD simulations that the TM-polarized case indeed reacts more sensitively to the change in grating size.
    • Comparison between Figs. reveals that the discrepancies between experimental and simulated results are relatively larger for the TM-polarized light than for the TE polarization. We attribute this to the small laser spot size 4 and 5 μm employed in our experiments, which was necessary to make the probed area smaller than the grating length; the finite spot size was however not taken into account in the RCWA simulations. Though not included in this paper, we have confirmed using independent FDTD simulations that the TM-polarized case indeed reacts more sensitively to the change in grating size.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.